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- W1972157091 abstract "This paper describes an image sensing method and defect detection algorithm applied for a newly developed mask inspection system, the MC-2000, for 256 Mbit and 1 Gbit DRAM masks. The MC-2000, which utilizes i-line wavelength optics, is designed for less than 0.2 micrometer defect detection capability. An image sensing system employing a TDI (time delay integration) CCD image sensor is used for i-line image acquisition with an 80 Mpixel/sec data rate. Defect detection is done by comparing sensor image data with CAD data. Here we utilized our original differential comparison method which has very high sensitivity for defect detection." @default.
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- W1972157091 date "1997-07-28" @default.
- W1972157091 modified "2023-09-23" @default.
- W1972157091 title "Image sensing method and defect detection algorithm for a 256-Mb and 1-Gb DRAM mask inspection system" @default.
- W1972157091 doi "https://doi.org/10.1117/12.277286" @default.
- W1972157091 hasPublicationYear "1997" @default.
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