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Matches in SemOpenAlex for { <https://semopenalex.org/work/W1972250596> ?p ?o ?g. }

• W1972250596 endingPage "554" @default.
• W1972250596 startingPage "547" @default.
• W1972250596 abstract "A method to design a reactive sputtering process with stoichiometric deposition and no hysteresis is developed. This method is a further development of the model based on mass, energy and entropy balances. The results of numerical simulation are compared to experimental data available in the literature for the Ti reactive sputtering process in the presence of N2 in an Ar atmosphere." @default.
• W1972250596 created "2016-06-24" @default.
• W1972250596 creator A5037510070 @default.
• W1972250596 creator A5088589335 @default.
• W1972250596 date "2013-08-01" @default.
• W1972250596 modified "2023-09-25" @default.
• W1972250596 title "Method to design stoichiometric deposition reactive sputtering without hysteresis" @default.
• W1972250596 cites W187024979 @default.
• W1972250596 cites W1969341202 @default.
• W1972250596 cites W1973625042 @default.
• W1972250596 cites W1976030731 @default.
• W1972250596 cites W1976751553 @default.
• W1972250596 cites W1984782310 @default.
• W1972250596 cites W1987385860 @default.
• W1972250596 cites W2000718153 @default.
• W1972250596 cites W2003424855 @default.
• W1972250596 cites W2004952641 @default.
• W1972250596 cites W2008091582 @default.
• W1972250596 cites W2014778273 @default.
• W1972250596 cites W2021704753 @default.
• W1972250596 cites W2026176527 @default.
• W1972250596 cites W2026648097 @default.
• W1972250596 cites W2031250202 @default.
• W1972250596 cites W2034048972 @default.
• W1972250596 cites W2034336035 @default.
• W1972250596 cites W2039029947 @default.
• W1972250596 cites W2045153511 @default.
• W1972250596 cites W2059049006 @default.
• W1972250596 cites W2071574590 @default.
• W1972250596 cites W2073191118 @default.
• W1972250596 cites W2074813429 @default.
• W1972250596 cites W2083593291 @default.
• W1972250596 cites W2084205546 @default.
• W1972250596 cites W2091179719 @default.
• W1972250596 doi "https://doi.org/10.1179/1743294413y.0000000155" @default.
• W1972250596 hasPublicationYear "2013" @default.
• W1972250596 type Work @default.
• W1972250596 sameAs 1972250596 @default.
• W1972250596 citedByCount "2" @default.
• W1972250596 countsByYear W19722505962020 @default.
• W1972250596 countsByYear W19722505962023 @default.
• W1972250596 crossrefType "journal-article" @default.
• W1972250596 hasAuthorship W1972250596A5037510070 @default.
• W1972250596 hasAuthorship W1972250596A5088589335 @default.
• W1972250596 hasConcept C121332964 @default.
• W1972250596 hasConcept C123299182 @default.
• W1972250596 hasConcept C127413603 @default.
• W1972250596 hasConcept C144082473 @default.
• W1972250596 hasConcept C147789679 @default.
• W1972250596 hasConcept C151730666 @default.
• W1972250596 hasConcept C171250308 @default.
• W1972250596 hasConcept C185592680 @default.
• W1972250596 hasConcept C19067145 @default.
• W1972250596 hasConcept C191897082 @default.
• W1972250596 hasConcept C192562407 @default.
• W1972250596 hasConcept C22423302 @default.
• W1972250596 hasConcept C26873012 @default.
• W1972250596 hasConcept C2780841128 @default.
• W1972250596 hasConcept C2816523 @default.
• W1972250596 hasConcept C42360764 @default.
• W1972250596 hasConcept C64297162 @default.
• W1972250596 hasConcept C86803240 @default.
• W1972250596 hasConceptScore W1972250596C121332964 @default.
• W1972250596 hasConceptScore W1972250596C123299182 @default.
• W1972250596 hasConceptScore W1972250596C127413603 @default.
• W1972250596 hasConceptScore W1972250596C144082473 @default.
• W1972250596 hasConceptScore W1972250596C147789679 @default.
• W1972250596 hasConceptScore W1972250596C151730666 @default.
• W1972250596 hasConceptScore W1972250596C171250308 @default.
• W1972250596 hasConceptScore W1972250596C185592680 @default.
• W1972250596 hasConceptScore W1972250596C19067145 @default.
• W1972250596 hasConceptScore W1972250596C191897082 @default.
• W1972250596 hasConceptScore W1972250596C192562407 @default.
• W1972250596 hasConceptScore W1972250596C22423302 @default.
• W1972250596 hasConceptScore W1972250596C26873012 @default.
• W1972250596 hasConceptScore W1972250596C2780841128 @default.
• W1972250596 hasConceptScore W1972250596C2816523 @default.
• W1972250596 hasConceptScore W1972250596C42360764 @default.
• W1972250596 hasConceptScore W1972250596C64297162 @default.
• W1972250596 hasConceptScore W1972250596C86803240 @default.
• W1972250596 hasIssue "7" @default.
• W1972250596 hasLocation W19722505961 @default.
• W1972250596 hasOpenAccess W1972250596 @default.
• W1972250596 hasPrimaryLocation W19722505961 @default.
• W1972250596 hasRelatedWork W1808722926 @default.
• W1972250596 hasRelatedWork W1994472584 @default.
• W1972250596 hasRelatedWork W2043613658 @default.
• W1972250596 hasRelatedWork W2062557956 @default.
• W1972250596 hasRelatedWork W2066382428 @default.
• W1972250596 hasRelatedWork W2241884239 @default.
• W1972250596 hasRelatedWork W2316948141 @default.
• W1972250596 hasRelatedWork W2317485906 @default.
• W1972250596 hasRelatedWork W2364423132 @default.
• W1972250596 hasRelatedWork W3088727433 @default.
• W1972250596 hasVolume "29" @default.
• W1972250596 isParatext "false" @default.
• W1972250596 isRetracted "false" @default.
• W1972250596 magId "1972250596" @default.

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