Matches in SemOpenAlex for { <https://semopenalex.org/work/W1972300312> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W1972300312 endingPage "990" @default.
- W1972300312 startingPage "987" @default.
- W1972300312 abstract "Abstract During the sputter deposition process both the sputtered atoms and reflected neutral atoms contribute to the overall energy flux to the growing film. The sputtered atoms have typically 5–20 eV as they leave the target. The reflected neutrals may have considerably more energy though the number reflected towards the substrate is highly system dependent. These energetic atoms collide with the sputtering gas and transfer some of their energy to the gas atoms as they travel to the substrate. Recent theoretical predictions of Robinson have shown the scattering cross-sections for these energetic atoms is considerably less than the standard thermal scattering cross-sections. We calculate the main effect of these energy dependent, as opposed to thermal, scattering cross-sections is a twofold decrease in the effectiveness of the sputtering gas in thermalizing the sputtered atoms and an even greater effect on the more energetic reflected neutrals. In this paper the energy distribution of the energetic atoms as they are progressively thermalized is presented; in our previous calculation we considered only an average. These results for the energy distributions are related to some phenomena associated with the sputter deposition of metallic films." @default.
- W1972300312 created "2016-06-24" @default.
- W1972300312 creator A5049526544 @default.
- W1972300312 date "1984-10-01" @default.
- W1972300312 modified "2023-09-26" @default.
- W1972300312 title "Calculations of thermalization during the sputter deposition process" @default.
- W1972300312 cites W1981554517 @default.
- W1972300312 cites W1983704517 @default.
- W1972300312 cites W2010391598 @default.
- W1972300312 cites W2011919472 @default.
- W1972300312 cites W2024590188 @default.
- W1972300312 cites W2038766008 @default.
- W1972300312 cites W2040179900 @default.
- W1972300312 cites W2043997040 @default.
- W1972300312 cites W2047496346 @default.
- W1972300312 cites W2051808038 @default.
- W1972300312 cites W2065517485 @default.
- W1972300312 cites W2073948514 @default.
- W1972300312 cites W2091222373 @default.
- W1972300312 cites W2094093516 @default.
- W1972300312 cites W2142748006 @default.
- W1972300312 doi "https://doi.org/10.1016/0042-207x(84)90183-0" @default.
- W1972300312 hasPublicationYear "1984" @default.
- W1972300312 type Work @default.
- W1972300312 sameAs 1972300312 @default.
- W1972300312 citedByCount "42" @default.
- W1972300312 countsByYear W19723003122012 @default.
- W1972300312 countsByYear W19723003122013 @default.
- W1972300312 countsByYear W19723003122014 @default.
- W1972300312 countsByYear W19723003122017 @default.
- W1972300312 countsByYear W19723003122021 @default.
- W1972300312 crossrefType "journal-article" @default.
- W1972300312 hasAuthorship W1972300312A5049526544 @default.
- W1972300312 hasConcept C111919701 @default.
- W1972300312 hasConcept C116915560 @default.
- W1972300312 hasConcept C121332964 @default.
- W1972300312 hasConcept C127313418 @default.
- W1972300312 hasConcept C127413603 @default.
- W1972300312 hasConcept C151730666 @default.
- W1972300312 hasConcept C15359245 @default.
- W1972300312 hasConcept C159467904 @default.
- W1972300312 hasConcept C171250308 @default.
- W1972300312 hasConcept C184779094 @default.
- W1972300312 hasConcept C185592680 @default.
- W1972300312 hasConcept C19067145 @default.
- W1972300312 hasConcept C192562407 @default.
- W1972300312 hasConcept C22423302 @default.
- W1972300312 hasConcept C2816523 @default.
- W1972300312 hasConcept C39432304 @default.
- W1972300312 hasConcept C41008148 @default.
- W1972300312 hasConcept C61427134 @default.
- W1972300312 hasConcept C64297162 @default.
- W1972300312 hasConcept C98045186 @default.
- W1972300312 hasConceptScore W1972300312C111919701 @default.
- W1972300312 hasConceptScore W1972300312C116915560 @default.
- W1972300312 hasConceptScore W1972300312C121332964 @default.
- W1972300312 hasConceptScore W1972300312C127313418 @default.
- W1972300312 hasConceptScore W1972300312C127413603 @default.
- W1972300312 hasConceptScore W1972300312C151730666 @default.
- W1972300312 hasConceptScore W1972300312C15359245 @default.
- W1972300312 hasConceptScore W1972300312C159467904 @default.
- W1972300312 hasConceptScore W1972300312C171250308 @default.
- W1972300312 hasConceptScore W1972300312C184779094 @default.
- W1972300312 hasConceptScore W1972300312C185592680 @default.
- W1972300312 hasConceptScore W1972300312C19067145 @default.
- W1972300312 hasConceptScore W1972300312C192562407 @default.
- W1972300312 hasConceptScore W1972300312C22423302 @default.
- W1972300312 hasConceptScore W1972300312C2816523 @default.
- W1972300312 hasConceptScore W1972300312C39432304 @default.
- W1972300312 hasConceptScore W1972300312C41008148 @default.
- W1972300312 hasConceptScore W1972300312C61427134 @default.
- W1972300312 hasConceptScore W1972300312C64297162 @default.
- W1972300312 hasConceptScore W1972300312C98045186 @default.
- W1972300312 hasIssue "10-11" @default.
- W1972300312 hasLocation W19723003121 @default.
- W1972300312 hasOpenAccess W1972300312 @default.
- W1972300312 hasPrimaryLocation W19723003121 @default.
- W1972300312 hasRelatedWork W1589673715 @default.
- W1972300312 hasRelatedWork W189174387 @default.
- W1972300312 hasRelatedWork W2019423004 @default.
- W1972300312 hasRelatedWork W2024849425 @default.
- W1972300312 hasRelatedWork W2316014324 @default.
- W1972300312 hasRelatedWork W2367592328 @default.
- W1972300312 hasRelatedWork W2377897286 @default.
- W1972300312 hasRelatedWork W2899084033 @default.
- W1972300312 hasRelatedWork W3142908518 @default.
- W1972300312 hasRelatedWork W2530396216 @default.
- W1972300312 hasVolume "34" @default.
- W1972300312 isParatext "false" @default.
- W1972300312 isRetracted "false" @default.
- W1972300312 magId "1972300312" @default.
- W1972300312 workType "article" @default.