Matches in SemOpenAlex for { <https://semopenalex.org/work/W1972372700> ?p ?o ?g. }
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- W1972372700 endingPage "082402" @default.
- W1972372700 startingPage "082402" @default.
- W1972372700 abstract "The patterning characteristics of matrix projection exposure using an analog liquid crystal display (LCD) panel in place of a reticle were investigated, in particular for oblique patterns. In addition, a new method for fabricating practical thick resist molds was developed. At first, an exposure system fabricated in past research was reconstructed. Changes in the illumination optics and the projection lens were the main improvements. Using fly's eye lenses, the illumination light intensity distribution was homogenized. The projection lens was changed from a common camera lens to a higher-grade telecentric lens. In addition, although the same metal halide lamp was used as an exposure light source, the central exposure wavelength was slightly shortened from 480 to 450 nm to obtain higher resist sensitivity while maintaining almost equivalent contrast between black and white. Circular and radial patterns with linewidths of approximately 6 µm were uniformly printed in all directions throughout the exposure field owing to these improvements. The patterns were smoothly printed without accompanying stepwise roughness caused by the cell matrix array. On the bases of these results, a new method of fabricating thick resist molds for electroplating was investigated. It is known that thick resist molds fabricated using the negative resist SU-8 (Micro Chem) are useful because very high aspect patterns are printable and the side walls are perpendicular to the substrate surfaces. However, the most suitable exposure wavelength of SU-8 is 365 nm, and SU-8 is insensitive to light of 450 nm wavelength, which is most appropriate for LCD matrix exposure. For this reason, a novel multilayer resist process was proposed, and micromolds of SU-8 of 50 µm thickness were successfully obtained. As a result, feasibility for fabricating complex resist molds including oblique patterns was demonstrated." @default.
- W1972372700 created "2016-06-24" @default.
- W1972372700 creator A5071753292 @default.
- W1972372700 creator A5081422004 @default.
- W1972372700 date "2009-08-20" @default.
- W1972372700 modified "2023-09-25" @default.
- W1972372700 title "Application of Matrix Projection Exposure Using a Liquid Crystal Display Panel to Fabricate Thick Resist Molds" @default.
- W1972372700 cites W1655474970 @default.
- W1972372700 cites W1970143526 @default.
- W1972372700 cites W1988090103 @default.
- W1972372700 cites W1988128389 @default.
- W1972372700 cites W2006702349 @default.
- W1972372700 cites W2014317570 @default.
- W1972372700 cites W2018888820 @default.
- W1972372700 cites W2028881285 @default.
- W1972372700 cites W2034775996 @default.
- W1972372700 cites W2039826940 @default.
- W1972372700 cites W2052568874 @default.
- W1972372700 cites W2065447548 @default.
- W1972372700 cites W2073110016 @default.
- W1972372700 cites W2079929139 @default.
- W1972372700 cites W2080484040 @default.
- W1972372700 cites W2082983861 @default.
- W1972372700 cites W2086407784 @default.
- W1972372700 cites W2101243746 @default.
- W1972372700 cites W2124854950 @default.
- W1972372700 cites W4240015105 @default.
- W1972372700 doi "https://doi.org/10.1143/jjap.48.082402" @default.
- W1972372700 hasPublicationYear "2009" @default.
- W1972372700 type Work @default.
- W1972372700 sameAs 1972372700 @default.
- W1972372700 citedByCount "4" @default.
- W1972372700 countsByYear W19723727002012 @default.
- W1972372700 countsByYear W19723727002015 @default.
- W1972372700 countsByYear W19723727002016 @default.
- W1972372700 crossrefType "journal-article" @default.
- W1972372700 hasAuthorship W1972372700A5071753292 @default.
- W1972372700 hasAuthorship W1972372700A5081422004 @default.
- W1972372700 hasConcept C106487976 @default.
- W1972372700 hasConcept C120665830 @default.
- W1972372700 hasConcept C121332964 @default.
- W1972372700 hasConcept C128019096 @default.
- W1972372700 hasConcept C134406635 @default.
- W1972372700 hasConcept C15336307 @default.
- W1972372700 hasConcept C159985019 @default.
- W1972372700 hasConcept C171250308 @default.
- W1972372700 hasConcept C192560794 @default.
- W1972372700 hasConcept C192562407 @default.
- W1972372700 hasConcept C199631012 @default.
- W1972372700 hasConcept C2524010 @default.
- W1972372700 hasConcept C2779227376 @default.
- W1972372700 hasConcept C33923547 @default.
- W1972372700 hasConcept C49040817 @default.
- W1972372700 hasConcept C53524968 @default.
- W1972372700 hasConcept C6260449 @default.
- W1972372700 hasConceptScore W1972372700C106487976 @default.
- W1972372700 hasConceptScore W1972372700C120665830 @default.
- W1972372700 hasConceptScore W1972372700C121332964 @default.
- W1972372700 hasConceptScore W1972372700C128019096 @default.
- W1972372700 hasConceptScore W1972372700C134406635 @default.
- W1972372700 hasConceptScore W1972372700C15336307 @default.
- W1972372700 hasConceptScore W1972372700C159985019 @default.
- W1972372700 hasConceptScore W1972372700C171250308 @default.
- W1972372700 hasConceptScore W1972372700C192560794 @default.
- W1972372700 hasConceptScore W1972372700C192562407 @default.
- W1972372700 hasConceptScore W1972372700C199631012 @default.
- W1972372700 hasConceptScore W1972372700C2524010 @default.
- W1972372700 hasConceptScore W1972372700C2779227376 @default.
- W1972372700 hasConceptScore W1972372700C33923547 @default.
- W1972372700 hasConceptScore W1972372700C49040817 @default.
- W1972372700 hasConceptScore W1972372700C53524968 @default.
- W1972372700 hasConceptScore W1972372700C6260449 @default.
- W1972372700 hasIssue "8" @default.
- W1972372700 hasLocation W19723727001 @default.
- W1972372700 hasOpenAccess W1972372700 @default.
- W1972372700 hasPrimaryLocation W19723727001 @default.
- W1972372700 hasRelatedWork W1972372700 @default.
- W1972372700 hasRelatedWork W1996159456 @default.
- W1972372700 hasRelatedWork W2009247258 @default.
- W1972372700 hasRelatedWork W2015870604 @default.
- W1972372700 hasRelatedWork W2017070680 @default.
- W1972372700 hasRelatedWork W2038630043 @default.
- W1972372700 hasRelatedWork W2088295097 @default.
- W1972372700 hasRelatedWork W2294687285 @default.
- W1972372700 hasRelatedWork W2896734203 @default.
- W1972372700 hasRelatedWork W2514501518 @default.
- W1972372700 hasVolume "48" @default.
- W1972372700 isParatext "false" @default.
- W1972372700 isRetracted "false" @default.
- W1972372700 magId "1972372700" @default.
- W1972372700 workType "article" @default.