Matches in SemOpenAlex for { <https://semopenalex.org/work/W1972424541> ?p ?o ?g. }
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- W1972424541 endingPage "759" @default.
- W1972424541 startingPage "753" @default.
- W1972424541 abstract "In this paper system-specific limitations of uniformity and the necessity for better temperature control for rapid thermal processing (RTP) for VLSI applications will be demonstrated. A sensitive technique feasible for temperature monitoring in production is presented which makes use of modulated optical reflectance measurements of highly implanted Si wafers after annealing. Problems with temperature calibration by thermocouples are reported which may influence, e.g., self-aligned silicide formation at ∼ 650°C. Dynamic effects leading to serious problems with temperature uniformity during short time cycles and their consequences on polysilicon emitter formation of bipolar transistors by RTP are discussed. A theoretical model is presented." @default.
- W1972424541 created "2016-06-24" @default.
- W1972424541 creator A5066080685 @default.
- W1972424541 date "1989-02-01" @default.
- W1972424541 modified "2023-09-28" @default.
- W1972424541 title "Temperature problems with rapid thermal processing for vlsi applications" @default.
- W1972424541 cites W2000199128 @default.
- W1972424541 cites W2012933481 @default.
- W1972424541 cites W2043262095 @default.
- W1972424541 cites W2045591516 @default.
- W1972424541 doi "https://doi.org/10.1016/0168-583x(89)90292-9" @default.
- W1972424541 hasPublicationYear "1989" @default.
- W1972424541 type Work @default.
- W1972424541 sameAs 1972424541 @default.
- W1972424541 citedByCount "17" @default.
- W1972424541 crossrefType "journal-article" @default.
- W1972424541 hasAuthorship W1972424541A5066080685 @default.
- W1972424541 hasConcept C119599485 @default.
- W1972424541 hasConcept C121332964 @default.
- W1972424541 hasConcept C127413603 @default.
- W1972424541 hasConcept C14580979 @default.
- W1972424541 hasConcept C153294291 @default.
- W1972424541 hasConcept C159985019 @default.
- W1972424541 hasConcept C160671074 @default.
- W1972424541 hasConcept C165801399 @default.
- W1972424541 hasConcept C165838908 @default.
- W1972424541 hasConcept C168068576 @default.
- W1972424541 hasConcept C172385210 @default.
- W1972424541 hasConcept C192562407 @default.
- W1972424541 hasConcept C204530211 @default.
- W1972424541 hasConcept C23061349 @default.
- W1972424541 hasConcept C24326235 @default.
- W1972424541 hasConcept C2777855556 @default.
- W1972424541 hasConcept C2780901251 @default.
- W1972424541 hasConcept C41008148 @default.
- W1972424541 hasConcept C46918542 @default.
- W1972424541 hasConcept C49040817 @default.
- W1972424541 hasConcept C536315585 @default.
- W1972424541 hasConcept C544956773 @default.
- W1972424541 hasConcept C62520636 @default.
- W1972424541 hasConcept C72293138 @default.
- W1972424541 hasConcept C72832162 @default.
- W1972424541 hasConcept C78519656 @default.
- W1972424541 hasConceptScore W1972424541C119599485 @default.
- W1972424541 hasConceptScore W1972424541C121332964 @default.
- W1972424541 hasConceptScore W1972424541C127413603 @default.
- W1972424541 hasConceptScore W1972424541C14580979 @default.
- W1972424541 hasConceptScore W1972424541C153294291 @default.
- W1972424541 hasConceptScore W1972424541C159985019 @default.
- W1972424541 hasConceptScore W1972424541C160671074 @default.
- W1972424541 hasConceptScore W1972424541C165801399 @default.
- W1972424541 hasConceptScore W1972424541C165838908 @default.
- W1972424541 hasConceptScore W1972424541C168068576 @default.
- W1972424541 hasConceptScore W1972424541C172385210 @default.
- W1972424541 hasConceptScore W1972424541C192562407 @default.
- W1972424541 hasConceptScore W1972424541C204530211 @default.
- W1972424541 hasConceptScore W1972424541C23061349 @default.
- W1972424541 hasConceptScore W1972424541C24326235 @default.
- W1972424541 hasConceptScore W1972424541C2777855556 @default.
- W1972424541 hasConceptScore W1972424541C2780901251 @default.
- W1972424541 hasConceptScore W1972424541C41008148 @default.
- W1972424541 hasConceptScore W1972424541C46918542 @default.
- W1972424541 hasConceptScore W1972424541C49040817 @default.
- W1972424541 hasConceptScore W1972424541C536315585 @default.
- W1972424541 hasConceptScore W1972424541C544956773 @default.
- W1972424541 hasConceptScore W1972424541C62520636 @default.
- W1972424541 hasConceptScore W1972424541C72293138 @default.
- W1972424541 hasConceptScore W1972424541C72832162 @default.
- W1972424541 hasConceptScore W1972424541C78519656 @default.
- W1972424541 hasLocation W19724245411 @default.
- W1972424541 hasOpenAccess W1972424541 @default.
- W1972424541 hasPrimaryLocation W19724245411 @default.
- W1972424541 hasRelatedWork W1531122188 @default.
- W1972424541 hasRelatedWork W1635724746 @default.
- W1972424541 hasRelatedWork W1924356952 @default.
- W1972424541 hasRelatedWork W1972424541 @default.
- W1972424541 hasRelatedWork W2026064981 @default.
- W1972424541 hasRelatedWork W2075677619 @default.
- W1972424541 hasRelatedWork W2114776132 @default.
- W1972424541 hasRelatedWork W2137765418 @default.
- W1972424541 hasRelatedWork W2316272916 @default.
- W1972424541 hasRelatedWork W247509610 @default.
- W1972424541 hasVolume "37-38" @default.
- W1972424541 isParatext "false" @default.
- W1972424541 isRetracted "false" @default.
- W1972424541 magId "1972424541" @default.
- W1972424541 workType "article" @default.