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- W1972473874 endingPage "05EC03" @default.
- W1972473874 startingPage "05EC03" @default.
- W1972473874 abstract "Chemical mechanical polishing (CMP) has been used in polishing a photomask substrate in flat-panel display (FPD) manufacture. Moreover, the quadrilateral geometry of quartz glass used as the photomask substrate has been enlarged. However, the slurry cannot flow throughout the glass surface evenly owing to the enlarged substrate covering the center of the platen in the polishing process. In this work, we verified the beneficial of spreading slurry into a non-inflow region by the reinforced suction of the slurry supplied to the polishing pad through a hole at center of the platen. A fluorescent agent was used instead of the slurry for flow visualization." @default.
- W1972473874 created "2016-06-24" @default.
- W1972473874 creator A5010703590 @default.
- W1972473874 creator A5059704901 @default.
- W1972473874 creator A5067124146 @default.
- W1972473874 creator A5081881262 @default.
- W1972473874 creator A5085546320 @default.
- W1972473874 date "2011-05-01" @default.
- W1972473874 modified "2023-09-24" @default.
- W1972473874 title "Slurry Supplying Method for Large Quartz Glass Substrate Polishing" @default.
- W1972473874 cites W1969442371 @default.
- W1972473874 cites W2136530576 @default.
- W1972473874 doi "https://doi.org/10.1143/jjap.50.05ec03" @default.
- W1972473874 hasPublicationYear "2011" @default.
- W1972473874 type Work @default.
- W1972473874 sameAs 1972473874 @default.
- W1972473874 citedByCount "2" @default.
- W1972473874 countsByYear W19724738742014 @default.
- W1972473874 countsByYear W19724738742017 @default.
- W1972473874 crossrefType "journal-article" @default.
- W1972473874 hasAuthorship W1972473874A5010703590 @default.
- W1972473874 hasAuthorship W1972473874A5059704901 @default.
- W1972473874 hasAuthorship W1972473874A5067124146 @default.
- W1972473874 hasAuthorship W1972473874A5081881262 @default.
- W1972473874 hasAuthorship W1972473874A5085546320 @default.
- W1972473874 hasConcept C111368507 @default.
- W1972473874 hasConcept C127313418 @default.
- W1972473874 hasConcept C138113353 @default.
- W1972473874 hasConcept C14737013 @default.
- W1972473874 hasConcept C159985019 @default.
- W1972473874 hasConcept C180088628 @default.
- W1972473874 hasConcept C192562407 @default.
- W1972473874 hasConcept C2777289219 @default.
- W1972473874 hasConcept C2779227376 @default.
- W1972473874 hasConcept C2779870107 @default.
- W1972473874 hasConcept C53524968 @default.
- W1972473874 hasConcept C94293008 @default.
- W1972473874 hasConcept C96170274 @default.
- W1972473874 hasConceptScore W1972473874C111368507 @default.
- W1972473874 hasConceptScore W1972473874C127313418 @default.
- W1972473874 hasConceptScore W1972473874C138113353 @default.
- W1972473874 hasConceptScore W1972473874C14737013 @default.
- W1972473874 hasConceptScore W1972473874C159985019 @default.
- W1972473874 hasConceptScore W1972473874C180088628 @default.
- W1972473874 hasConceptScore W1972473874C192562407 @default.
- W1972473874 hasConceptScore W1972473874C2777289219 @default.
- W1972473874 hasConceptScore W1972473874C2779227376 @default.
- W1972473874 hasConceptScore W1972473874C2779870107 @default.
- W1972473874 hasConceptScore W1972473874C53524968 @default.
- W1972473874 hasConceptScore W1972473874C94293008 @default.
- W1972473874 hasConceptScore W1972473874C96170274 @default.
- W1972473874 hasIssue "5S1" @default.
- W1972473874 hasLocation W19724738741 @default.
- W1972473874 hasOpenAccess W1972473874 @default.
- W1972473874 hasPrimaryLocation W19724738741 @default.
- W1972473874 hasRelatedWork W1972473874 @default.
- W1972473874 hasRelatedWork W2085781254 @default.
- W1972473874 hasRelatedWork W2182869943 @default.
- W1972473874 hasRelatedWork W2326287029 @default.
- W1972473874 hasRelatedWork W2357457016 @default.
- W1972473874 hasRelatedWork W2386326752 @default.
- W1972473874 hasRelatedWork W2390231680 @default.
- W1972473874 hasRelatedWork W2940858272 @default.
- W1972473874 hasRelatedWork W4220886489 @default.
- W1972473874 hasRelatedWork W4230485264 @default.
- W1972473874 hasVolume "50" @default.
- W1972473874 isParatext "false" @default.
- W1972473874 isRetracted "false" @default.
- W1972473874 magId "1972473874" @default.
- W1972473874 workType "article" @default.