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- W1972493023 endingPage "L91" @default.
- W1972493023 startingPage "L91" @default.
- W1972493023 abstract "Hydrogenated amorphous silicon films have been grown on glass substrates by photodissociation of disilane using a pulsed ArF excimer laser foe the first time. Electrical and optical properties of the films have been examined. It was found that the magnitude of the gap energy of laser CVD films is rather large as compared to that of films obtained by a conventional plasma CVD. Preliminary examinations to control the conductivity by impurity doping have also been performed." @default.
- W1972493023 created "2016-06-24" @default.
- W1972493023 creator A5016307485 @default.
- W1972493023 creator A5032257442 @default.
- W1972493023 date "1984-02-01" @default.
- W1972493023 modified "2023-09-24" @default.
- W1972493023 title "Growth of Hydrogenated Amorphous Silicon Films by ArF Excimer Laser Photodissociation of Disilane" @default.
- W1972493023 cites W1969211042 @default.
- W1972493023 cites W1998711683 @default.
- W1972493023 cites W2002137749 @default.
- W1972493023 cites W2011359560 @default.
- W1972493023 cites W2013734872 @default.
- W1972493023 cites W2021459351 @default.
- W1972493023 cites W2052970291 @default.
- W1972493023 cites W2068206282 @default.
- W1972493023 doi "https://doi.org/10.1143/jjap.23.l91" @default.
- W1972493023 hasPublicationYear "1984" @default.
- W1972493023 type Work @default.
- W1972493023 sameAs 1972493023 @default.
- W1972493023 citedByCount "32" @default.
- W1972493023 crossrefType "journal-article" @default.
- W1972493023 hasAuthorship W1972493023A5016307485 @default.
- W1972493023 hasAuthorship W1972493023A5032257442 @default.
- W1972493023 hasConcept C113196181 @default.
- W1972493023 hasConcept C120665830 @default.
- W1972493023 hasConcept C121332964 @default.
- W1972493023 hasConcept C171250308 @default.
- W1972493023 hasConcept C178790620 @default.
- W1972493023 hasConcept C185592680 @default.
- W1972493023 hasConcept C19067145 @default.
- W1972493023 hasConcept C192562407 @default.
- W1972493023 hasConcept C2776259327 @default.
- W1972493023 hasConcept C2776390347 @default.
- W1972493023 hasConcept C2779667780 @default.
- W1972493023 hasConcept C2780477314 @default.
- W1972493023 hasConcept C49040817 @default.
- W1972493023 hasConcept C520434653 @default.
- W1972493023 hasConcept C544956773 @default.
- W1972493023 hasConcept C54582936 @default.
- W1972493023 hasConcept C56052488 @default.
- W1972493023 hasConcept C57863236 @default.
- W1972493023 hasConcept C71987851 @default.
- W1972493023 hasConcept C75473681 @default.
- W1972493023 hasConcept C8010536 @default.
- W1972493023 hasConceptScore W1972493023C113196181 @default.
- W1972493023 hasConceptScore W1972493023C120665830 @default.
- W1972493023 hasConceptScore W1972493023C121332964 @default.
- W1972493023 hasConceptScore W1972493023C171250308 @default.
- W1972493023 hasConceptScore W1972493023C178790620 @default.
- W1972493023 hasConceptScore W1972493023C185592680 @default.
- W1972493023 hasConceptScore W1972493023C19067145 @default.
- W1972493023 hasConceptScore W1972493023C192562407 @default.
- W1972493023 hasConceptScore W1972493023C2776259327 @default.
- W1972493023 hasConceptScore W1972493023C2776390347 @default.
- W1972493023 hasConceptScore W1972493023C2779667780 @default.
- W1972493023 hasConceptScore W1972493023C2780477314 @default.
- W1972493023 hasConceptScore W1972493023C49040817 @default.
- W1972493023 hasConceptScore W1972493023C520434653 @default.
- W1972493023 hasConceptScore W1972493023C544956773 @default.
- W1972493023 hasConceptScore W1972493023C54582936 @default.
- W1972493023 hasConceptScore W1972493023C56052488 @default.
- W1972493023 hasConceptScore W1972493023C57863236 @default.
- W1972493023 hasConceptScore W1972493023C71987851 @default.
- W1972493023 hasConceptScore W1972493023C75473681 @default.
- W1972493023 hasConceptScore W1972493023C8010536 @default.
- W1972493023 hasIssue "2A" @default.
- W1972493023 hasLocation W19724930231 @default.
- W1972493023 hasOpenAccess W1972493023 @default.
- W1972493023 hasPrimaryLocation W19724930231 @default.
- W1972493023 hasRelatedWork W1979746207 @default.
- W1972493023 hasRelatedWork W1991054084 @default.
- W1972493023 hasRelatedWork W2008399498 @default.
- W1972493023 hasRelatedWork W2023103230 @default.
- W1972493023 hasRelatedWork W2047224587 @default.
- W1972493023 hasRelatedWork W2047476251 @default.
- W1972493023 hasRelatedWork W2052710927 @default.
- W1972493023 hasRelatedWork W2078187760 @default.
- W1972493023 hasRelatedWork W3004638923 @default.
- W1972493023 hasRelatedWork W4297828600 @default.
- W1972493023 hasVolume "23" @default.
- W1972493023 isParatext "false" @default.
- W1972493023 isRetracted "false" @default.
- W1972493023 magId "1972493023" @default.
- W1972493023 workType "article" @default.