FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1972629810> ?p ?o ?g. }

• W1972629810 endingPage "559" @default.
• W1972629810 startingPage "555" @default.
• W1972629810 abstract "As part of a programme aiming at the development of small nuclear radiation detectors, for example thermal detectors and position sensitive mosaic structures of surface barrier type, a technique for micromachining the detector bodies in silicon has been developed. The technique is based on an anisotropic etching property of a solution, mainly consisting of KOH. The etch rate is strongly orientation dependent with a speed in the 〈100〉 direction about 400 times faster than in the 〈111〉 direction. The major steps in the etching procedure are described and some examples of deep etching in Si are shown." @default.
• W1972629810 created "2016-06-24" @default.
• W1972629810 creator A5018574353 @default.
• W1972629810 creator A5032240610 @default.
• W1972629810 creator A5040187765 @default.
• W1972629810 creator A5048667827 @default.
• W1972629810 creator A5049724929 @default.
• W1972629810 creator A5051215032 @default.
• W1972629810 creator A5067019610 @default.
• W1972629810 creator A5071629120 @default.
• W1972629810 creator A5073844805 @default.
• W1972629810 date "1989-07-01" @default.
• W1972629810 modified "2023-09-27" @default.
• W1972629810 title "Micromachining of silicon for thermal and position-sensitive nuclear detector applications" @default.
• W1972629810 cites W1964289311 @default.
• W1972629810 cites W1979078109 @default.
• W1972629810 cites W2031910277 @default.
• W1972629810 cites W2042843234 @default.
• W1972629810 cites W2044329796 @default.
• W1972629810 cites W2050105624 @default.
• W1972629810 cites W2057123954 @default.
• W1972629810 cites W2085890203 @default.
• W1972629810 doi "https://doi.org/10.1016/0168-9002(89)91302-8" @default.
• W1972629810 hasPublicationYear "1989" @default.
• W1972629810 type Work @default.
• W1972629810 sameAs 1972629810 @default.
• W1972629810 citedByCount "4" @default.
• W1972629810 crossrefType "journal-article" @default.
• W1972629810 hasAuthorship W1972629810A5018574353 @default.
• W1972629810 hasAuthorship W1972629810A5032240610 @default.
• W1972629810 hasAuthorship W1972629810A5040187765 @default.
• W1972629810 hasAuthorship W1972629810A5048667827 @default.
• W1972629810 hasAuthorship W1972629810A5049724929 @default.
• W1972629810 hasAuthorship W1972629810A5051215032 @default.
• W1972629810 hasAuthorship W1972629810A5067019610 @default.
• W1972629810 hasAuthorship W1972629810A5071629120 @default.
• W1972629810 hasAuthorship W1972629810A5073844805 @default.
• W1972629810 hasConcept C100460472 @default.
• W1972629810 hasConcept C10138342 @default.
• W1972629810 hasConcept C120665830 @default.
• W1972629810 hasConcept C121332964 @default.
• W1972629810 hasConcept C136525101 @default.
• W1972629810 hasConcept C142724271 @default.
• W1972629810 hasConcept C145667562 @default.
• W1972629810 hasConcept C153294291 @default.
• W1972629810 hasConcept C162324750 @default.
• W1972629810 hasConcept C16345878 @default.
• W1972629810 hasConcept C171250308 @default.
• W1972629810 hasConcept C192562407 @default.
• W1972629810 hasConcept C198082294 @default.
• W1972629810 hasConcept C204530211 @default.
• W1972629810 hasConcept C204787440 @default.
• W1972629810 hasConcept C2524010 @default.
• W1972629810 hasConcept C2779227376 @default.
• W1972629810 hasConcept C33220542 @default.
• W1972629810 hasConcept C33923547 @default.
• W1972629810 hasConcept C41075158 @default.
• W1972629810 hasConcept C49040817 @default.
• W1972629810 hasConcept C544956773 @default.
• W1972629810 hasConcept C71924100 @default.
• W1972629810 hasConcept C85725439 @default.
• W1972629810 hasConcept C94915269 @default.
• W1972629810 hasConceptScore W1972629810C100460472 @default.
• W1972629810 hasConceptScore W1972629810C10138342 @default.
• W1972629810 hasConceptScore W1972629810C120665830 @default.
• W1972629810 hasConceptScore W1972629810C121332964 @default.
• W1972629810 hasConceptScore W1972629810C136525101 @default.
• W1972629810 hasConceptScore W1972629810C142724271 @default.
• W1972629810 hasConceptScore W1972629810C145667562 @default.
• W1972629810 hasConceptScore W1972629810C153294291 @default.
• W1972629810 hasConceptScore W1972629810C162324750 @default.
• W1972629810 hasConceptScore W1972629810C16345878 @default.
• W1972629810 hasConceptScore W1972629810C171250308 @default.
• W1972629810 hasConceptScore W1972629810C192562407 @default.
• W1972629810 hasConceptScore W1972629810C198082294 @default.
• W1972629810 hasConceptScore W1972629810C204530211 @default.
• W1972629810 hasConceptScore W1972629810C204787440 @default.
• W1972629810 hasConceptScore W1972629810C2524010 @default.
• W1972629810 hasConceptScore W1972629810C2779227376 @default.
• W1972629810 hasConceptScore W1972629810C33220542 @default.
• W1972629810 hasConceptScore W1972629810C33923547 @default.
• W1972629810 hasConceptScore W1972629810C41075158 @default.
• W1972629810 hasConceptScore W1972629810C49040817 @default.
• W1972629810 hasConceptScore W1972629810C544956773 @default.
• W1972629810 hasConceptScore W1972629810C71924100 @default.
• W1972629810 hasConceptScore W1972629810C85725439 @default.
• W1972629810 hasConceptScore W1972629810C94915269 @default.
• W1972629810 hasIssue "3" @default.
• W1972629810 hasLocation W19726298101 @default.
• W1972629810 hasOpenAccess W1972629810 @default.
• W1972629810 hasPrimaryLocation W19726298101 @default.
• W1972629810 hasRelatedWork W1582682810 @default.
• W1972629810 hasRelatedWork W1584171941 @default.
• W1972629810 hasRelatedWork W2013241063 @default.
• W1972629810 hasRelatedWork W2031401186 @default.
• W1972629810 hasRelatedWork W2050746330 @default.
• W1972629810 hasRelatedWork W2741274830 @default.
• W1972629810 hasRelatedWork W2748603911 @default.

• next