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- W1972797134 abstract "We have developed different Si/sub x/O/sub y/N/sub z/ antireflective coating (ARC) films for many different substrates for deep-UV lithography and implemented then into sub-0.18 /spl mu/m logic and Gigabit DRAM frontend and backend processes. The Si/sub x/O/sub y/N/sub z/ film has dual functions: reducing substrate reflectivity to a minimum, and serving as a hardmask for poly and metal etch. These properties of Si/sub x/O/sub y/N/sub z/ are crucial to tight CD control and fabrication of unique device structures. Plasma damage from ARC deposition is negligible. Using the designed Si/sub x/O/sub y/N/sub z/ and linewidth reduction etch, sub-0.1 /spl mu/m metal gate nMOSFETs are demonstrated. Backend sub-0.25 /spl mu/m multilevel metal patterning and etch with Si/sub x/O/sub y/N/sub z/ produce excellent metal profiles and 100% comb yield. A designed ARC also produces superior 1 Gigabit DRAM 0.16 /spl mu/m storage node contact patterning." @default.
- W1972797134 created "2016-06-24" @default.
- W1972797134 creator A5003374144 @default.
- W1972797134 creator A5003959057 @default.
- W1972797134 creator A5015059768 @default.
- W1972797134 creator A5018050675 @default.
- W1972797134 creator A5019861607 @default.
- W1972797134 creator A5025600931 @default.
- W1972797134 creator A5032133880 @default.
- W1972797134 creator A5032496382 @default.
- W1972797134 creator A5032563726 @default.
- W1972797134 creator A5038915707 @default.
- W1972797134 creator A5045531939 @default.
- W1972797134 creator A5046616581 @default.
- W1972797134 creator A5054374275 @default.
- W1972797134 creator A5063622872 @default.
- W1972797134 creator A5080442804 @default.
- W1972797134 date "2002-11-27" @default.
- W1972797134 modified "2023-09-22" @default.
- W1972797134 title "ARC for sub-0.18 μm logic and gigabit DRAM frontend and backend processes" @default.
- W1972797134 cites W1966147208 @default.
- W1972797134 cites W2539089020 @default.
- W1972797134 doi "https://doi.org/10.1109/vlsit.1998.689210" @default.
- W1972797134 hasPublicationYear "2002" @default.
- W1972797134 type Work @default.
- W1972797134 sameAs 1972797134 @default.
- W1972797134 citedByCount "0" @default.
- W1972797134 crossrefType "proceedings-article" @default.
- W1972797134 hasAuthorship W1972797134A5003374144 @default.
- W1972797134 hasAuthorship W1972797134A5003959057 @default.
- W1972797134 hasAuthorship W1972797134A5015059768 @default.
- W1972797134 hasAuthorship W1972797134A5018050675 @default.
- W1972797134 hasAuthorship W1972797134A5019861607 @default.
- W1972797134 hasAuthorship W1972797134A5025600931 @default.
- W1972797134 hasAuthorship W1972797134A5032133880 @default.
- W1972797134 hasAuthorship W1972797134A5032496382 @default.
- W1972797134 hasAuthorship W1972797134A5032563726 @default.
- W1972797134 hasAuthorship W1972797134A5038915707 @default.
- W1972797134 hasAuthorship W1972797134A5045531939 @default.
- W1972797134 hasAuthorship W1972797134A5046616581 @default.
- W1972797134 hasAuthorship W1972797134A5054374275 @default.
- W1972797134 hasAuthorship W1972797134A5063622872 @default.
- W1972797134 hasAuthorship W1972797134A5080442804 @default.
- W1972797134 hasConcept C100460472 @default.
- W1972797134 hasConcept C105487726 @default.
- W1972797134 hasConcept C171250308 @default.
- W1972797134 hasConcept C192562407 @default.
- W1972797134 hasConcept C2779227376 @default.
- W1972797134 hasConcept C49040817 @default.
- W1972797134 hasConcept C7366592 @default.
- W1972797134 hasConceptScore W1972797134C100460472 @default.
- W1972797134 hasConceptScore W1972797134C105487726 @default.
- W1972797134 hasConceptScore W1972797134C171250308 @default.
- W1972797134 hasConceptScore W1972797134C192562407 @default.
- W1972797134 hasConceptScore W1972797134C2779227376 @default.
- W1972797134 hasConceptScore W1972797134C49040817 @default.
- W1972797134 hasConceptScore W1972797134C7366592 @default.
- W1972797134 hasLocation W19727971341 @default.
- W1972797134 hasOpenAccess W1972797134 @default.
- W1972797134 hasPrimaryLocation W19727971341 @default.
- W1972797134 hasRelatedWork W1489941049 @default.
- W1972797134 hasRelatedWork W1506655603 @default.
- W1972797134 hasRelatedWork W1598291716 @default.
- W1972797134 hasRelatedWork W1842997546 @default.
- W1972797134 hasRelatedWork W1895332828 @default.
- W1972797134 hasRelatedWork W1914639462 @default.
- W1972797134 hasRelatedWork W1990479210 @default.
- W1972797134 hasRelatedWork W2013376645 @default.
- W1972797134 hasRelatedWork W2025699371 @default.
- W1972797134 hasRelatedWork W2046472895 @default.
- W1972797134 hasRelatedWork W2070967178 @default.
- W1972797134 hasRelatedWork W2079848353 @default.
- W1972797134 hasRelatedWork W2131605789 @default.
- W1972797134 hasRelatedWork W2536319606 @default.
- W1972797134 hasRelatedWork W2536970577 @default.
- W1972797134 hasRelatedWork W2540030474 @default.
- W1972797134 hasRelatedWork W2542133832 @default.
- W1972797134 hasRelatedWork W97170507 @default.
- W1972797134 hasRelatedWork W1988948616 @default.
- W1972797134 hasRelatedWork W2166475725 @default.
- W1972797134 isParatext "false" @default.
- W1972797134 isRetracted "false" @default.
- W1972797134 magId "1972797134" @default.
- W1972797134 workType "article" @default.