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- W1972912369 abstract "A well-defined area of free-hanging thin film may be obtained by chemically dissolving the substrate on a fraction of its surface. A global evaluation of the thin-film pinholes may then be obtained by measuring the gas conductance across the film. To do so, copper discs clamped between Con-Flat flanges have been used to separate a chamber filled with helium gas from another chamber where the helium throughput was measured. This method has been used to compare films produced under dust-free and dusty conditions, of various surface roughnesses and at different deposition incidence angles." @default.
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- W1972912369 date "2001-01-01" @default.
- W1972912369 modified "2023-10-14" @default.
- W1972912369 title "Experimental evaluation of Niobium film pinholes" @default.
- W1972912369 cites W2011024770 @default.
- W1972912369 doi "https://doi.org/10.1016/s0042-207x(00)00388-2" @default.
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