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- W1973014769 abstract "We report for the first time the temperature dependence of the piezoelectric coefficient d33 of the aluminum nitride (AlN) film measured at temperatures up to 300 °C. A highly c-axis oriented AlN film was successfully deposited on a polycrystalline silicon / silicon dioxide / silicon wafer by a reactive sputtering technique to form a piezoelectric uni-morph actuator. A scanning laser Doppler vibrometer was used to measure the picometer level displacement of the actuator at 20 kHz at different temperatures. The piezoelectric coefficient d33 has a constant value of 5 pC/N at temperatures ranging between 20 °C and 300 °C." @default.
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- W1973014769 date "2006-01-01" @default.
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- W1973014769 title "Temperature Dependence of Piezoelectric Properties of Sputtered Aluminum Nitride on Silicon Substrate" @default.
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- W1973014769 doi "https://doi.org/10.1541/ieejsmas.126.158" @default.
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