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- W1973075598 abstract "Coherent anti-Stokes Raman spectroscopy has been employed for the diagnosis of rf discharges of silane (SiH 4 ) and disilane (Si 2 H 6 ). The signal intensities from silane and disilane have been measured as a function of time after switching-on the rf power supplied to SiH 4 and Si 2 H 6 gas in a closed reaction chamber. From this measurement, the loss rates of silane and disilane have been determined directly as functions of the rf-power density and gas pressure for the first time. The rate of formation of SiH 4 in disilane discharge plasmas has also been determined." @default.
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- W1973075598 date "1986-01-01" @default.
- W1973075598 modified "2023-09-26" @default.
- W1973075598 title "Coherent Anti-Stokes Raman Spectroscopy of Radio-Frequency Discharge Plasmas of Silane and Disilane" @default.
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- W1973075598 doi "https://doi.org/10.1143/jjap.25.108" @default.
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