FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1973084925> ?p ?o ?g. }

• W1973084925 endingPage "3291" @default.
• W1973084925 startingPage "3284" @default.
• W1973084925 abstract "Ion beam lithography of a silicon surface using an Ar ion beam with an ion energy in the order of hundreds of keV is demonstrated in this study. A specially designed ion irradiation facility was employed that enabled generation and irradiation with a highly accelerated and highly charged Ar ion beam. An ion-beam-induced amorphous layer on a silicon substrate can be selectively etched in hydrofluoric acid, whereas, a non-irradiated area is scarcely etched and, consequently, a concave structure can be fabricated on the irradiated area. To control the depth of the structure, parameters for dependence of the depth on ion irradiation were investigated. As a result, the depth of irradiated area can be controlled by the ion energy that is adjusted by the acceleration voltage and the ion charge. In addition, the etch resistance of the irradiated area increases with an increase in ion energy due to the crystalline layer formed on the surface. Simulation results reveal that the depth is strongly related to the defect distribution induced by ion irradiation. These results indicate the potential use of this method for novel three-dimensional lithography." @default.
• W1973084925 created "2016-06-24" @default.
• W1973084925 creator A5019476180 @default.
• W1973084925 creator A5020653533 @default.
• W1973084925 creator A5022056985 @default.
• W1973084925 creator A5030688964 @default.
• W1973084925 creator A5059421802 @default.
• W1973084925 creator A5072167565 @default.
• W1973084925 creator A5089582199 @default.
• W1973084925 creator A5091158809 @default.
• W1973084925 date "2007-01-01" @default.
• W1973084925 modified "2023-09-27" @default.
• W1973084925 title "Depth control of a silicon structure fabricated by 100qkeV Ar ion beam lithography" @default.
• W1973084925 cites W1969322154 @default.
• W1973084925 cites W1975160104 @default.
• W1973084925 cites W1976592898 @default.
• W1973084925 cites W1978786345 @default.
• W1973084925 cites W1987566312 @default.
• W1973084925 cites W1993669959 @default.
• W1973084925 cites W1999553457 @default.
• W1973084925 cites W2000945766 @default.
• W1973084925 cites W2003147326 @default.
• W1973084925 cites W2008419825 @default.
• W1973084925 cites W2017978370 @default.
• W1973084925 cites W2019241008 @default.
• W1973084925 cites W2020206607 @default.
• W1973084925 cites W2041305404 @default.
• W1973084925 cites W2042471641 @default.
• W1973084925 cites W2044503260 @default.
• W1973084925 cites W2046799075 @default.
• W1973084925 cites W2046836182 @default.
• W1973084925 cites W2047550087 @default.
• W1973084925 cites W2060610219 @default.
• W1973084925 cites W2061907980 @default.
• W1973084925 cites W2069694297 @default.
• W1973084925 cites W2076086168 @default.
• W1973084925 cites W2108375600 @default.
• W1973084925 cites W2154431735 @default.
• W1973084925 doi "https://doi.org/10.1016/j.apsusc.2006.07.037" @default.
• W1973084925 hasPublicationYear "2007" @default.
• W1973084925 type Work @default.
• W1973084925 sameAs 1973084925 @default.
• W1973084925 citedByCount "12" @default.
• W1973084925 countsByYear W19730849252013 @default.
• W1973084925 countsByYear W19730849252016 @default.
• W1973084925 countsByYear W19730849252018 @default.
• W1973084925 countsByYear W19730849252019 @default.
• W1973084925 countsByYear W19730849252020 @default.
• W1973084925 crossrefType "journal-article" @default.
• W1973084925 hasAuthorship W1973084925A5019476180 @default.
• W1973084925 hasAuthorship W1973084925A5020653533 @default.
• W1973084925 hasAuthorship W1973084925A5022056985 @default.
• W1973084925 hasAuthorship W1973084925A5030688964 @default.
• W1973084925 hasAuthorship W1973084925A5059421802 @default.
• W1973084925 hasAuthorship W1973084925A5072167565 @default.
• W1973084925 hasAuthorship W1973084925A5089582199 @default.
• W1973084925 hasAuthorship W1973084925A5091158809 @default.
• W1973084925 hasConcept C111337013 @default.
• W1973084925 hasConcept C111368507 @default.
• W1973084925 hasConcept C113196181 @default.
• W1973084925 hasConcept C121332964 @default.
• W1973084925 hasConcept C127313418 @default.
• W1973084925 hasConcept C145148216 @default.
• W1973084925 hasConcept C178790620 @default.
• W1973084925 hasConcept C185544564 @default.
• W1973084925 hasConcept C185592680 @default.
• W1973084925 hasConcept C192562407 @default.
• W1973084925 hasConcept C204223013 @default.
• W1973084925 hasConcept C2777289219 @default.
• W1973084925 hasConcept C43617362 @default.
• W1973084925 hasConcept C49040817 @default.
• W1973084925 hasConcept C50774322 @default.
• W1973084925 hasConcept C544956773 @default.
• W1973084925 hasConcept C56052488 @default.
• W1973084925 hasConcept C8010536 @default.
• W1973084925 hasConcept C93106096 @default.
• W1973084925 hasConceptScore W1973084925C111337013 @default.
• W1973084925 hasConceptScore W1973084925C111368507 @default.
• W1973084925 hasConceptScore W1973084925C113196181 @default.
• W1973084925 hasConceptScore W1973084925C121332964 @default.
• W1973084925 hasConceptScore W1973084925C127313418 @default.
• W1973084925 hasConceptScore W1973084925C145148216 @default.
• W1973084925 hasConceptScore W1973084925C178790620 @default.
• W1973084925 hasConceptScore W1973084925C185544564 @default.
• W1973084925 hasConceptScore W1973084925C185592680 @default.
• W1973084925 hasConceptScore W1973084925C192562407 @default.
• W1973084925 hasConceptScore W1973084925C204223013 @default.
• W1973084925 hasConceptScore W1973084925C2777289219 @default.
• W1973084925 hasConceptScore W1973084925C43617362 @default.
• W1973084925 hasConceptScore W1973084925C49040817 @default.
• W1973084925 hasConceptScore W1973084925C50774322 @default.
• W1973084925 hasConceptScore W1973084925C544956773 @default.
• W1973084925 hasConceptScore W1973084925C56052488 @default.
• W1973084925 hasConceptScore W1973084925C8010536 @default.
• W1973084925 hasConceptScore W1973084925C93106096 @default.
• W1973084925 hasFunder F4320320912 @default.
• W1973084925 hasFunder F4320334764 @default.
• W1973084925 hasIssue "6" @default.

• next