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- W1973126965 endingPage "1577" @default.
- W1973126965 startingPage "1576" @default.
- W1973126965 abstract "This paper describes microcontact printing (muCP) of long-chain alkanethiolates on palladium, followed by solution-phase etching with an iron(III)-based etchant, to make patterned structures. The commonly used soft-lithographic procedure for fabricating microstructures-muCP of SAMs on gold-has three shortcomings: a significant surface density of pinhole defects, substantial edge roughness, and incompatibility with processes used in CMOS fabrication. Microcontact printing on palladium gives fewer defects and smaller edge roughness than on gold, and is compatible with CMOS. The mechanism by which etch-resistant patterns are formed is different for palladium and gold. The Pd/S interfacial layer formed by the reaction of palladium films with sulfur-containing compounds provides good resistance to etches independently of the barrier to access the surface provided by the film of (CH2)n groups in the long-chain SAMs. This barrier is the basis of the etch resistance of SAMs on gold, but only supplements the etch resistance of the sulfur-containing interfacial layer on palladium. Characterization of the SAM formed from hexadecanethiol on palladium is described." @default.
- W1973126965 created "2016-06-24" @default.
- W1973126965 creator A5001076999 @default.
- W1973126965 creator A5017714164 @default.
- W1973126965 creator A5046560705 @default.
- W1973126965 creator A5051537916 @default.
- W1973126965 creator A5090961989 @default.
- W1973126965 date "2002-02-01" @default.
- W1973126965 modified "2023-09-27" @default.
- W1973126965 title "Self-Assembled Monolayers of Alkanethiolates on Palladium Are Good Etch Resists" @default.
- W1973126965 cites W1483698797 @default.
- W1973126965 cites W1966319358 @default.
- W1973126965 cites W2000991443 @default.
- W1973126965 doi "https://doi.org/10.1021/ja012569l" @default.
- W1973126965 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/11853422" @default.
- W1973126965 hasPublicationYear "2002" @default.
- W1973126965 type Work @default.
- W1973126965 sameAs 1973126965 @default.
- W1973126965 citedByCount "115" @default.
- W1973126965 countsByYear W19731269652012 @default.
- W1973126965 countsByYear W19731269652013 @default.
- W1973126965 countsByYear W19731269652014 @default.
- W1973126965 countsByYear W19731269652015 @default.
- W1973126965 countsByYear W19731269652016 @default.
- W1973126965 countsByYear W19731269652017 @default.
- W1973126965 countsByYear W19731269652018 @default.
- W1973126965 countsByYear W19731269652019 @default.
- W1973126965 countsByYear W19731269652020 @default.
- W1973126965 countsByYear W19731269652021 @default.
- W1973126965 countsByYear W19731269652022 @default.
- W1973126965 countsByYear W19731269652023 @default.
- W1973126965 crossrefType "journal-article" @default.
- W1973126965 hasAuthorship W1973126965A5001076999 @default.
- W1973126965 hasAuthorship W1973126965A5017714164 @default.
- W1973126965 hasAuthorship W1973126965A5046560705 @default.
- W1973126965 hasAuthorship W1973126965A5051537916 @default.
- W1973126965 hasAuthorship W1973126965A5090961989 @default.
- W1973126965 hasConcept C100460472 @default.
- W1973126965 hasConcept C127413603 @default.
- W1973126965 hasConcept C131649739 @default.
- W1973126965 hasConcept C159985019 @default.
- W1973126965 hasConcept C161790260 @default.
- W1973126965 hasConcept C171250308 @default.
- W1973126965 hasConcept C178790620 @default.
- W1973126965 hasConcept C185592680 @default.
- W1973126965 hasConcept C188027245 @default.
- W1973126965 hasConcept C192562407 @default.
- W1973126965 hasConcept C204223013 @default.
- W1973126965 hasConcept C2779227376 @default.
- W1973126965 hasConcept C42360764 @default.
- W1973126965 hasConcept C49040817 @default.
- W1973126965 hasConcept C502130503 @default.
- W1973126965 hasConcept C53524968 @default.
- W1973126965 hasConcept C58943365 @default.
- W1973126965 hasConcept C66825105 @default.
- W1973126965 hasConcept C7070889 @default.
- W1973126965 hasConcept C71039073 @default.
- W1973126965 hasConceptScore W1973126965C100460472 @default.
- W1973126965 hasConceptScore W1973126965C127413603 @default.
- W1973126965 hasConceptScore W1973126965C131649739 @default.
- W1973126965 hasConceptScore W1973126965C159985019 @default.
- W1973126965 hasConceptScore W1973126965C161790260 @default.
- W1973126965 hasConceptScore W1973126965C171250308 @default.
- W1973126965 hasConceptScore W1973126965C178790620 @default.
- W1973126965 hasConceptScore W1973126965C185592680 @default.
- W1973126965 hasConceptScore W1973126965C188027245 @default.
- W1973126965 hasConceptScore W1973126965C192562407 @default.
- W1973126965 hasConceptScore W1973126965C204223013 @default.
- W1973126965 hasConceptScore W1973126965C2779227376 @default.
- W1973126965 hasConceptScore W1973126965C42360764 @default.
- W1973126965 hasConceptScore W1973126965C49040817 @default.
- W1973126965 hasConceptScore W1973126965C502130503 @default.
- W1973126965 hasConceptScore W1973126965C53524968 @default.
- W1973126965 hasConceptScore W1973126965C58943365 @default.
- W1973126965 hasConceptScore W1973126965C66825105 @default.
- W1973126965 hasConceptScore W1973126965C7070889 @default.
- W1973126965 hasConceptScore W1973126965C71039073 @default.
- W1973126965 hasIssue "8" @default.
- W1973126965 hasLocation W19731269651 @default.
- W1973126965 hasLocation W19731269652 @default.
- W1973126965 hasOpenAccess W1973126965 @default.
- W1973126965 hasPrimaryLocation W19731269651 @default.
- W1973126965 hasRelatedWork W1972658890 @default.
- W1973126965 hasRelatedWork W1973126965 @default.
- W1973126965 hasRelatedWork W1980278535 @default.
- W1973126965 hasRelatedWork W2002693891 @default.
- W1973126965 hasRelatedWork W2044079975 @default.
- W1973126965 hasRelatedWork W2057909519 @default.
- W1973126965 hasRelatedWork W2064523701 @default.
- W1973126965 hasRelatedWork W2070084956 @default.
- W1973126965 hasRelatedWork W2089746739 @default.
- W1973126965 hasRelatedWork W4256435472 @default.
- W1973126965 hasVolume "124" @default.
- W1973126965 isParatext "false" @default.
- W1973126965 isRetracted "false" @default.
- W1973126965 magId "1973126965" @default.
- W1973126965 workType "article" @default.