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• W1973160670 endingPage "53" @default.
• W1973160670 startingPage "35" @default.
• W1973160670 abstract "A review of micro resonant force gauges is presented. A theoretical description is given of gauges operating in a flexural mode of vibration, including a discussion of non-linear effects. Gauge factor and quality factor are defined and their relevance is discussed. Performance issues such as sensitivity, stability and resolution are addressed. Design aspects, including the means for excitation and detection of the vibration, and examples of silicon microfabrication technologies are described." @default.
• W1973160670 created "2016-06-24" @default.
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• W1973160670 date "1992-01-01" @default.
• W1973160670 modified "2023-10-18" @default.
• W1973160670 title "Micro resonant force gauges" @default.
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• W1973160670 doi "https://doi.org/10.1016/0924-4247(92)80194-8" @default.
• W1973160670 hasPublicationYear "1992" @default.
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