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• W1973168575 endingPage "1151" @default.
• W1973168575 startingPage "1147" @default.
• W1973168575 abstract "Amorphous carbon nitride (a-CNx) films made by a reactive sputtering of a carbon target with nitrogen plasma shows high resistivity and high electrical breakdown field. Therefore, a-CNx is a good material as a dielectric material. In this paper, the effects of hydrogen-plasma and oxygen-plasma treatment to the dielectric properties of a-CNx films were studied, discussed and compared. A cyclic process of the deposition of a thin a-CNx film and hydrogen- and oxygen-plasma treatment, which is called the layer-by-layer process (LL), were used to make LLa-CNx and LLa-CNxOy films, respectively. Comparing the results of capacitance made of a-CNx, LLa-CNx, and LLa-CNxOy the most effective treatment to get smaller dielectric constant materials at present was to use hydrogen plasma treatment." @default.
• W1973168575 created "2016-06-24" @default.
• W1973168575 creator A5027737702 @default.
• W1973168575 creator A5077311661 @default.
• W1973168575 creator A5090003153 @default.
• W1973168575 creator A5091247459 @default.
• W1973168575 date "2001-03-01" @default.
• W1973168575 modified "2023-10-16" @default.
• W1973168575 title "The effect of hydrogen- and oxygen-plasma treatments on dielectric properties of amorphous carbon nitride films" @default.
• W1973168575 cites W1969198835 @default.
• W1973168575 cites W1976190519 @default.
• W1973168575 cites W1993476766 @default.
• W1973168575 cites W2019757775 @default.
• W1973168575 cites W2020909620 @default.
• W1973168575 cites W2077442099 @default.
• W1973168575 cites W2087329515 @default.
• W1973168575 cites W2088274333 @default.
• W1973168575 cites W2092750927 @default.
• W1973168575 cites W2094015771 @default.
• W1973168575 cites W2159049957 @default.
• W1973168575 cites W2171158322 @default.
• W1973168575 cites W2325292966 @default.
• W1973168575 doi "https://doi.org/10.1016/s0925-9635(00)00376-9" @default.
• W1973168575 hasPublicationYear "2001" @default.
• W1973168575 type Work @default.
• W1973168575 sameAs 1973168575 @default.
• W1973168575 citedByCount "17" @default.
• W1973168575 countsByYear W19731685752014 @default.
• W1973168575 countsByYear W19731685752015 @default.
• W1973168575 countsByYear W19731685752017 @default.
• W1973168575 countsByYear W19731685752018 @default.
• W1973168575 countsByYear W19731685752023 @default.
• W1973168575 crossrefType "journal-article" @default.
• W1973168575 hasAuthorship W1973168575A5027737702 @default.
• W1973168575 hasAuthorship W1973168575A5077311661 @default.
• W1973168575 hasAuthorship W1973168575A5090003153 @default.
• W1973168575 hasAuthorship W1973168575A5091247459 @default.
• W1973168575 hasConcept C104779481 @default.
• W1973168575 hasConcept C113196181 @default.
• W1973168575 hasConcept C121332964 @default.
• W1973168575 hasConcept C127413603 @default.
• W1973168575 hasConcept C133386390 @default.
• W1973168575 hasConcept C140205800 @default.
• W1973168575 hasConcept C159985019 @default.
• W1973168575 hasConcept C161790260 @default.
• W1973168575 hasConcept C171250308 @default.
• W1973168575 hasConcept C178790620 @default.
• W1973168575 hasConcept C185592680 @default.
• W1973168575 hasConcept C19067145 @default.
• W1973168575 hasConcept C192562407 @default.
• W1973168575 hasConcept C194760766 @default.
• W1973168575 hasConcept C201931942 @default.
• W1973168575 hasConcept C22423302 @default.
• W1973168575 hasConcept C2777492770 @default.
• W1973168575 hasConcept C2779227376 @default.
• W1973168575 hasConcept C42360764 @default.
• W1973168575 hasConcept C49040817 @default.
• W1973168575 hasConcept C512968161 @default.
• W1973168575 hasConcept C540031477 @default.
• W1973168575 hasConcept C56052488 @default.
• W1973168575 hasConcept C57410435 @default.
• W1973168575 hasConcept C62520636 @default.
• W1973168575 hasConcept C65165184 @default.
• W1973168575 hasConcept C75937256 @default.
• W1973168575 hasConcept C8010536 @default.
• W1973168575 hasConcept C82706917 @default.
• W1973168575 hasConceptScore W1973168575C104779481 @default.
• W1973168575 hasConceptScore W1973168575C113196181 @default.
• W1973168575 hasConceptScore W1973168575C121332964 @default.
• W1973168575 hasConceptScore W1973168575C127413603 @default.
• W1973168575 hasConceptScore W1973168575C133386390 @default.
• W1973168575 hasConceptScore W1973168575C140205800 @default.
• W1973168575 hasConceptScore W1973168575C159985019 @default.
• W1973168575 hasConceptScore W1973168575C161790260 @default.
• W1973168575 hasConceptScore W1973168575C171250308 @default.
• W1973168575 hasConceptScore W1973168575C178790620 @default.
• W1973168575 hasConceptScore W1973168575C185592680 @default.
• W1973168575 hasConceptScore W1973168575C19067145 @default.
• W1973168575 hasConceptScore W1973168575C192562407 @default.
• W1973168575 hasConceptScore W1973168575C194760766 @default.
• W1973168575 hasConceptScore W1973168575C201931942 @default.
• W1973168575 hasConceptScore W1973168575C22423302 @default.
• W1973168575 hasConceptScore W1973168575C2777492770 @default.
• W1973168575 hasConceptScore W1973168575C2779227376 @default.
• W1973168575 hasConceptScore W1973168575C42360764 @default.
• W1973168575 hasConceptScore W1973168575C49040817 @default.
• W1973168575 hasConceptScore W1973168575C512968161 @default.
• W1973168575 hasConceptScore W1973168575C540031477 @default.
• W1973168575 hasConceptScore W1973168575C56052488 @default.
• W1973168575 hasConceptScore W1973168575C57410435 @default.
• W1973168575 hasConceptScore W1973168575C62520636 @default.
• W1973168575 hasConceptScore W1973168575C65165184 @default.
• W1973168575 hasConceptScore W1973168575C75937256 @default.
• W1973168575 hasConceptScore W1973168575C8010536 @default.
• W1973168575 hasConceptScore W1973168575C82706917 @default.
• W1973168575 hasIssue "3-7" @default.
• W1973168575 hasLocation W19731685751 @default.
• W1973168575 hasOpenAccess W1973168575 @default.

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