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- W1973205960 abstract "We have manufactured a set of fine focusing soft X-ray sources to meet the requirements of the R&D work for the soft X-ray experimental station now under construction at the Synchrotron Radiation Laboratory, BEPC. The electrical and optical characteristics of the source have been measured thoroughly. The source has the advantages of a power over 1 kW, a small focused spot size (diameter 1–2 mm), flexibility and easy operation. Preliminary experiments on contact microscopy tests have been performed by using this source with various targets and resists under different exposure conditions. Some distinct construction images of standard copper grids and biological specimens have been obtained." @default.
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- W1973205960 date "1989-05-01" @default.
- W1973205960 modified "2023-09-29" @default.
- W1973205960 title "A fine focusing soft X-ray source for R&D work of the soft X-ray microscopy station at the BEPC synchrotron radiation laboratory" @default.
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- W1973205960 doi "https://doi.org/10.1016/0168-9002(89)90803-6" @default.
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