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• W1973277835 abstract "Thin nanocrystalline diamond films promising for IR optical applications were grown on Si substrates from methane-hydrogen gas mixture in a DC arc plasma CVD reactor. Three stages for the synthesis of the highly smooth noncrystalline diamond films are important: (i) substrate pretreatment with ultrafine diamond powder, (ii) excimer laser irradiation of seeded substrates, and (iii) two-step deposition process. A correlation between optical properties of the films and growth conditions has been established by means of Raman spectroscopy, spectroscopic ellipsometry and optical transmission spectroscopy techniques. Surface roughness, which was R<SUB>a</SUB> equals 8 - 40 nm for the 1 micrometers thick films, significantly decreased the transmission in the visible because of light scattering, but it had a negligible effect in the IR range. The films are transparent in the IR and have optical constants n equals 2.34-2.36 and k equals 0.005- 0.03. The hydrogen incorporation in the films in amounts up to 1.5% have been deduced from intensity of C-H absorption band around 2900 cm(superscript -1." @default.
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• W1973277835 date "1995-07-14" @default.
• W1973277835 modified "2023-09-23" @default.
• W1973277835 title "<title>Nanocrystalline diamond films: new material for IR optics</title>" @default.
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• W1973277835 doi "https://doi.org/10.1117/12.213708" @default.
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