Matches in SemOpenAlex for { <https://semopenalex.org/work/W1973302313> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W1973302313 abstract "A capacitive MEMS pressure sensor with high linearity is presented, which is based on a fixed spherical cap electrode and a multiple-layered membrane. In this sensor, the touch process of electrodes starts at the beginning of measuring range, and a hole-shape structure made by DRIE is added. The device can enable a good linearity during the whole measuring range. The analysis of touch status and linearity is performed, so that the novel structure is verified to be effective. Further more, the fabrication process of this sensor is proposed and introduced. This high-linear MEMS pressure sensor can provide a good choice to tire pressure monitoring system (TPMS), which will work at the press range of 100KPa to 800KPa." @default.
- W1973302313 created "2016-06-24" @default.
- W1973302313 creator A5002665141 @default.
- W1973302313 creator A5033507629 @default.
- W1973302313 creator A5034945412 @default.
- W1973302313 creator A5073501391 @default.
- W1973302313 date "2014-10-01" @default.
- W1973302313 modified "2023-09-23" @default.
- W1973302313 title "Design of a high-linear mems pressure sensor available for TPMS" @default.
- W1973302313 cites W1975549690 @default.
- W1973302313 cites W1993066160 @default.
- W1973302313 cites W2101194530 @default.
- W1973302313 cites W2163468400 @default.
- W1973302313 doi "https://doi.org/10.1109/icsict.2014.7021637" @default.
- W1973302313 hasPublicationYear "2014" @default.
- W1973302313 type Work @default.
- W1973302313 sameAs 1973302313 @default.
- W1973302313 citedByCount "2" @default.
- W1973302313 countsByYear W19733023132016 @default.
- W1973302313 countsByYear W19733023132021 @default.
- W1973302313 crossrefType "proceedings-article" @default.
- W1973302313 hasAuthorship W1973302313A5002665141 @default.
- W1973302313 hasAuthorship W1973302313A5033507629 @default.
- W1973302313 hasAuthorship W1973302313A5034945412 @default.
- W1973302313 hasAuthorship W1973302313A5073501391 @default.
- W1973302313 hasConcept C111919701 @default.
- W1973302313 hasConcept C119599485 @default.
- W1973302313 hasConcept C121332964 @default.
- W1973302313 hasConcept C127413603 @default.
- W1973302313 hasConcept C136525101 @default.
- W1973302313 hasConcept C142724271 @default.
- W1973302313 hasConcept C147789679 @default.
- W1973302313 hasConcept C17525397 @default.
- W1973302313 hasConcept C185592680 @default.
- W1973302313 hasConcept C192562407 @default.
- W1973302313 hasConcept C204787440 @default.
- W1973302313 hasConcept C206755178 @default.
- W1973302313 hasConcept C24326235 @default.
- W1973302313 hasConcept C24890656 @default.
- W1973302313 hasConcept C37977207 @default.
- W1973302313 hasConcept C41008148 @default.
- W1973302313 hasConcept C41325743 @default.
- W1973302313 hasConcept C49040817 @default.
- W1973302313 hasConcept C71924100 @default.
- W1973302313 hasConcept C77170095 @default.
- W1973302313 hasConcept C78519656 @default.
- W1973302313 hasConcept C80264047 @default.
- W1973302313 hasConcept C98045186 @default.
- W1973302313 hasConceptScore W1973302313C111919701 @default.
- W1973302313 hasConceptScore W1973302313C119599485 @default.
- W1973302313 hasConceptScore W1973302313C121332964 @default.
- W1973302313 hasConceptScore W1973302313C127413603 @default.
- W1973302313 hasConceptScore W1973302313C136525101 @default.
- W1973302313 hasConceptScore W1973302313C142724271 @default.
- W1973302313 hasConceptScore W1973302313C147789679 @default.
- W1973302313 hasConceptScore W1973302313C17525397 @default.
- W1973302313 hasConceptScore W1973302313C185592680 @default.
- W1973302313 hasConceptScore W1973302313C192562407 @default.
- W1973302313 hasConceptScore W1973302313C204787440 @default.
- W1973302313 hasConceptScore W1973302313C206755178 @default.
- W1973302313 hasConceptScore W1973302313C24326235 @default.
- W1973302313 hasConceptScore W1973302313C24890656 @default.
- W1973302313 hasConceptScore W1973302313C37977207 @default.
- W1973302313 hasConceptScore W1973302313C41008148 @default.
- W1973302313 hasConceptScore W1973302313C41325743 @default.
- W1973302313 hasConceptScore W1973302313C49040817 @default.
- W1973302313 hasConceptScore W1973302313C71924100 @default.
- W1973302313 hasConceptScore W1973302313C77170095 @default.
- W1973302313 hasConceptScore W1973302313C78519656 @default.
- W1973302313 hasConceptScore W1973302313C80264047 @default.
- W1973302313 hasConceptScore W1973302313C98045186 @default.
- W1973302313 hasLocation W19733023131 @default.
- W1973302313 hasOpenAccess W1973302313 @default.
- W1973302313 hasPrimaryLocation W19733023131 @default.
- W1973302313 hasRelatedWork W1964310168 @default.
- W1973302313 hasRelatedWork W1966735075 @default.
- W1973302313 hasRelatedWork W2007293688 @default.
- W1973302313 hasRelatedWork W2021574667 @default.
- W1973302313 hasRelatedWork W2043951612 @default.
- W1973302313 hasRelatedWork W2073623313 @default.
- W1973302313 hasRelatedWork W2074064349 @default.
- W1973302313 hasRelatedWork W2242350211 @default.
- W1973302313 hasRelatedWork W2246921289 @default.
- W1973302313 hasRelatedWork W2372430764 @default.
- W1973302313 hasRelatedWork W2373859092 @default.
- W1973302313 hasRelatedWork W2462279116 @default.
- W1973302313 hasRelatedWork W2528713528 @default.
- W1973302313 hasRelatedWork W2535366478 @default.
- W1973302313 hasRelatedWork W2555431396 @default.
- W1973302313 hasRelatedWork W2626860585 @default.
- W1973302313 hasRelatedWork W2741328743 @default.
- W1973302313 hasRelatedWork W3012520113 @default.
- W1973302313 hasRelatedWork W769946470 @default.
- W1973302313 hasRelatedWork W2099451684 @default.
- W1973302313 isParatext "false" @default.
- W1973302313 isRetracted "false" @default.
- W1973302313 magId "1973302313" @default.
- W1973302313 workType "article" @default.