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• W1973325136 endingPage "121" @default.
• W1973325136 startingPage "111" @default.
• W1973325136 abstract "This paper presents the optimization and characterization of SU-8 quad beam optical accelerometers based on intensity modulation. An applied acceleration causes a misalignment between three waveguides, resulting in variation of losses. Mechanical simulations have focused on the evaluation of sensitivity and the design of a robust junction between the mechanical beams and the inertial mass. Results demonstrate that perfectly rounded structures show at least 4.4 times less stress than L-shaped counterparts. Optical simulation predicts that the optimal configuration in terms of sensitivity is obtained when the waveguides are not completely misaligned, since then losses are insensitive to variations in acceleration. Numerical sensitivities ranging between 11.12 and 32.14 dB/g have been obtained. Fabrication has been simplified, now requiring only two photolithographic steps and electroplating Cu as a sacrificial layer. Experimental results show a reproducible experimental sensitivity of at least 13.1 dB/g" @default.
• W1973325136 created "2016-06-24" @default.
• W1973325136 creator A5004494562 @default.
• W1973325136 creator A5030943900 @default.
• W1973325136 creator A5055143565 @default.
• W1973325136 creator A5070486686 @default.
• W1973325136 creator A5084240796 @default.
• W1973325136 date "2007-02-01" @default.
• W1973325136 modified "2023-09-29" @default.
• W1973325136 title "SU-8 Optical Accelerometers" @default.
• W1973325136 cites W1870432510 @default.
• W1973325136 cites W1968750270 @default.
• W1973325136 cites W2011970708 @default.
• W1973325136 cites W2018146508 @default.
• W1973325136 cites W2023006295 @default.
• W1973325136 cites W2023323493 @default.
• W1973325136 cites W2023970428 @default.
• W1973325136 cites W2027732955 @default.
• W1973325136 cites W2027785931 @default.
• W1973325136 cites W2028308408 @default.
• W1973325136 cites W2042232015 @default.
• W1973325136 cites W2047451759 @default.
• W1973325136 cites W2059594496 @default.
• W1973325136 cites W2063476036 @default.
• W1973325136 cites W2069698225 @default.
• W1973325136 cites W2072746582 @default.
• W1973325136 cites W2073156168 @default.
• W1973325136 cites W2074250441 @default.
• W1973325136 cites W2080431484 @default.
• W1973325136 cites W2084046440 @default.
• W1973325136 cites W2100545184 @default.
• W1973325136 cites W2101243746 @default.
• W1973325136 cites W2102661041 @default.
• W1973325136 cites W2104609309 @default.
• W1973325136 cites W2119058725 @default.
• W1973325136 cites W2120255193 @default.
• W1973325136 cites W2122344339 @default.
• W1973325136 cites W2151195407 @default.
• W1973325136 cites W2154759250 @default.
• W1973325136 cites W2156091229 @default.
• W1973325136 cites W2156306285 @default.
• W1973325136 cites W2162731786 @default.
• W1973325136 doi "https://doi.org/10.1109/jmems.2006.885845" @default.
• W1973325136 hasPublicationYear "2007" @default.
• W1973325136 type Work @default.
• W1973325136 sameAs 1973325136 @default.
• W1973325136 citedByCount "53" @default.
• W1973325136 countsByYear W19733251362012 @default.
• W1973325136 countsByYear W19733251362013 @default.
• W1973325136 countsByYear W19733251362014 @default.
• W1973325136 countsByYear W19733251362015 @default.
• W1973325136 countsByYear W19733251362016 @default.
• W1973325136 countsByYear W19733251362017 @default.
• W1973325136 countsByYear W19733251362018 @default.
• W1973325136 countsByYear W19733251362019 @default.
• W1973325136 countsByYear W19733251362020 @default.
• W1973325136 countsByYear W19733251362021 @default.
• W1973325136 countsByYear W19733251362022 @default.
• W1973325136 countsByYear W19733251362023 @default.
• W1973325136 crossrefType "journal-article" @default.
• W1973325136 hasAuthorship W1973325136A5004494562 @default.
• W1973325136 hasAuthorship W1973325136A5030943900 @default.
• W1973325136 hasAuthorship W1973325136A5055143565 @default.
• W1973325136 hasAuthorship W1973325136A5070486686 @default.
• W1973325136 hasAuthorship W1973325136A5084240796 @default.
• W1973325136 hasConcept C115051666 @default.
• W1973325136 hasConcept C117896860 @default.
• W1973325136 hasConcept C120665830 @default.
• W1973325136 hasConcept C121332964 @default.
• W1973325136 hasConcept C127413603 @default.
• W1973325136 hasConcept C136525101 @default.
• W1973325136 hasConcept C142724271 @default.
• W1973325136 hasConcept C168834538 @default.
• W1973325136 hasConcept C192562407 @default.
• W1973325136 hasConcept C204787440 @default.
• W1973325136 hasConcept C21200559 @default.
• W1973325136 hasConcept C24326235 @default.
• W1973325136 hasConcept C24890656 @default.
• W1973325136 hasConcept C2780330379 @default.
• W1973325136 hasConcept C62520636 @default.
• W1973325136 hasConcept C71924100 @default.
• W1973325136 hasConcept C74650414 @default.
• W1973325136 hasConcept C76155785 @default.
• W1973325136 hasConcept C89805583 @default.
• W1973325136 hasConcept C93038891 @default.
• W1973325136 hasConceptScore W1973325136C115051666 @default.
• W1973325136 hasConceptScore W1973325136C117896860 @default.
• W1973325136 hasConceptScore W1973325136C120665830 @default.
• W1973325136 hasConceptScore W1973325136C121332964 @default.
• W1973325136 hasConceptScore W1973325136C127413603 @default.
• W1973325136 hasConceptScore W1973325136C136525101 @default.
• W1973325136 hasConceptScore W1973325136C142724271 @default.
• W1973325136 hasConceptScore W1973325136C168834538 @default.
• W1973325136 hasConceptScore W1973325136C192562407 @default.
• W1973325136 hasConceptScore W1973325136C204787440 @default.
• W1973325136 hasConceptScore W1973325136C21200559 @default.
• W1973325136 hasConceptScore W1973325136C24326235 @default.
• W1973325136 hasConceptScore W1973325136C24890656 @default.

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