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- W1973330928 abstract "The development and properties of reflective coatings for the x-ray offset mirror systems of the Linac Coherent Light Source (LCLS) free-electron laser (FEL) are discussed in this manuscript. The uniquely high instantaneous dose of the LCLS FEL beam translates to strict limits in terms of materials choice, thus leading to an x-ray mirror design consisting of a reflective coating deposited on a silicon substrate. Coherent wavefront preservation requirements for these mirrors result in stringent surface figure and finish specifications. DC-magnetron sputtered B4C and SiC thin film coatings with optimized stress, roughness and figure properties for the LCLS x-ray mirrors are presented. The evolution of microstructure, morphology, and stress of these thin films versus deposition conditions is discussed. Experimental results on the performance of these coatings with respect to FEL damage are also presented." @default.
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- W1973330928 date "2009-05-07" @default.
- W1973330928 modified "2023-09-26" @default.
- W1973330928 title "Morphology, microstructure, stress and damage properties of thin film coatings for the LCLS x-ray mirrors" @default.
- W1973330928 doi "https://doi.org/10.1117/12.823836" @default.
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