Matches in SemOpenAlex for { <https://semopenalex.org/work/W1973334839> ?p ?o ?g. }
- W1973334839 endingPage "198" @default.
- W1973334839 startingPage "195" @default.
- W1973334839 abstract "The ion-thin-film interaction during plasma chemical vapor deposition of diamond like carbon (DLC) films from a methane electron cyclotron resonance (ECR) plasma was investigated by means of in-situ ellipsometry. The ion bombardment during growth leads to a disturbed surface layer, which becomes apparent in the in-situ ellipsometric results by optical constants, which are higher than those for the bulk material. The optical constants of the modified surface layer increase with ion energy during deposition, but decrease with the addition of hydrogen to the source gas. After switching off the plasma, the increased optical constants of the surface layer relax to their equilibrium state. The sources of this modified film surface and the mechanisms for its relaxation are discussed in this paper." @default.
- W1973334839 created "2016-06-24" @default.
- W1973334839 creator A5047601612 @default.
- W1973334839 creator A5048400398 @default.
- W1973334839 creator A5054299106 @default.
- W1973334839 date "1997-10-01" @default.
- W1973334839 modified "2023-09-26" @default.
- W1973334839 title "Surface relaxation during plasma chemical vapor deposition of diamond-like carbon films, investigated by in-situ ellipsometry" @default.
- W1973334839 cites W1639167136 @default.
- W1973334839 cites W1968759897 @default.
- W1973334839 cites W1973566553 @default.
- W1973334839 cites W1992755218 @default.
- W1973334839 cites W1993621873 @default.
- W1973334839 cites W2005788553 @default.
- W1973334839 cites W2009748614 @default.
- W1973334839 cites W2011976848 @default.
- W1973334839 cites W2020296022 @default.
- W1973334839 cites W2025764195 @default.
- W1973334839 cites W2035581207 @default.
- W1973334839 cites W2054092027 @default.
- W1973334839 cites W2072212391 @default.
- W1973334839 cites W2072658656 @default.
- W1973334839 cites W2136005433 @default.
- W1973334839 cites W2163721174 @default.
- W1973334839 doi "https://doi.org/10.1016/s0040-6090(97)00423-9" @default.
- W1973334839 hasPublicationYear "1997" @default.
- W1973334839 type Work @default.
- W1973334839 sameAs 1973334839 @default.
- W1973334839 citedByCount "4" @default.
- W1973334839 countsByYear W19733348392013 @default.
- W1973334839 crossrefType "journal-article" @default.
- W1973334839 hasAuthorship W1973334839A5047601612 @default.
- W1973334839 hasAuthorship W1973334839A5048400398 @default.
- W1973334839 hasAuthorship W1973334839A5054299106 @default.
- W1973334839 hasConcept C104779481 @default.
- W1973334839 hasConcept C113196181 @default.
- W1973334839 hasConcept C121332964 @default.
- W1973334839 hasConcept C123380192 @default.
- W1973334839 hasConcept C140205800 @default.
- W1973334839 hasConcept C145148216 @default.
- W1973334839 hasConcept C151730666 @default.
- W1973334839 hasConcept C159985019 @default.
- W1973334839 hasConcept C171250308 @default.
- W1973334839 hasConcept C175361016 @default.
- W1973334839 hasConcept C178790620 @default.
- W1973334839 hasConcept C18293161 @default.
- W1973334839 hasConcept C185592680 @default.
- W1973334839 hasConcept C19067145 @default.
- W1973334839 hasConcept C192562407 @default.
- W1973334839 hasConcept C197751951 @default.
- W1973334839 hasConcept C2779227376 @default.
- W1973334839 hasConcept C2816523 @default.
- W1973334839 hasConcept C38347018 @default.
- W1973334839 hasConcept C43617362 @default.
- W1973334839 hasConcept C512968161 @default.
- W1973334839 hasConcept C57410435 @default.
- W1973334839 hasConcept C62520636 @default.
- W1973334839 hasConcept C64297162 @default.
- W1973334839 hasConcept C75937256 @default.
- W1973334839 hasConcept C82706917 @default.
- W1973334839 hasConcept C86803240 @default.
- W1973334839 hasConceptScore W1973334839C104779481 @default.
- W1973334839 hasConceptScore W1973334839C113196181 @default.
- W1973334839 hasConceptScore W1973334839C121332964 @default.
- W1973334839 hasConceptScore W1973334839C123380192 @default.
- W1973334839 hasConceptScore W1973334839C140205800 @default.
- W1973334839 hasConceptScore W1973334839C145148216 @default.
- W1973334839 hasConceptScore W1973334839C151730666 @default.
- W1973334839 hasConceptScore W1973334839C159985019 @default.
- W1973334839 hasConceptScore W1973334839C171250308 @default.
- W1973334839 hasConceptScore W1973334839C175361016 @default.
- W1973334839 hasConceptScore W1973334839C178790620 @default.
- W1973334839 hasConceptScore W1973334839C18293161 @default.
- W1973334839 hasConceptScore W1973334839C185592680 @default.
- W1973334839 hasConceptScore W1973334839C19067145 @default.
- W1973334839 hasConceptScore W1973334839C192562407 @default.
- W1973334839 hasConceptScore W1973334839C197751951 @default.
- W1973334839 hasConceptScore W1973334839C2779227376 @default.
- W1973334839 hasConceptScore W1973334839C2816523 @default.
- W1973334839 hasConceptScore W1973334839C38347018 @default.
- W1973334839 hasConceptScore W1973334839C43617362 @default.
- W1973334839 hasConceptScore W1973334839C512968161 @default.
- W1973334839 hasConceptScore W1973334839C57410435 @default.
- W1973334839 hasConceptScore W1973334839C62520636 @default.
- W1973334839 hasConceptScore W1973334839C64297162 @default.
- W1973334839 hasConceptScore W1973334839C75937256 @default.
- W1973334839 hasConceptScore W1973334839C82706917 @default.
- W1973334839 hasConceptScore W1973334839C86803240 @default.
- W1973334839 hasLocation W19733348391 @default.
- W1973334839 hasOpenAccess W1973334839 @default.
- W1973334839 hasPrimaryLocation W19733348391 @default.
- W1973334839 hasRelatedWork W1481682938 @default.
- W1973334839 hasRelatedWork W1973334839 @default.
- W1973334839 hasRelatedWork W2023476050 @default.
- W1973334839 hasRelatedWork W2031392092 @default.
- W1973334839 hasRelatedWork W2050961894 @default.
- W1973334839 hasRelatedWork W2061486574 @default.
- W1973334839 hasRelatedWork W2062610059 @default.