FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1973345440> ?p ?o ?g. }

• W1973345440 endingPage "1336" @default.
• W1973345440 startingPage "1329" @default.
• W1973345440 abstract "The reaction of tetrakis(dimethylamido)titanium [Ti(NMe2)4, tdmat] and ammonia to yield titanium nitride (TiN) thin films and gas phase dimethylamine (HNMe2) is discussed. Film growth is dominated by gas phase reactions which lead to the formation of large, oligomeric clusters of the form: These decompose on the surface of the growing film a temperatures ≳450 K. By isotopically labelling the ammonia with 15N or deuterium, we conclude that both the nitrogen in a clean TiN film and the nitrogen bound hydrogen (deuterium) in the gaseous dimethylamine product are derived exclusively from ammonia. Evidence for carbon contamination through the intermediacy of a TiNC metallocycle is provided. Our observations are compared with the known thermal chemistry of titanium dialkylamides in solution." @default.
• W1973345440 created "2016-06-24" @default.
• W1973345440 creator A5007657025 @default.
• W1973345440 date "1994-04-01" @default.
• W1973345440 modified "2023-09-24" @default.
• W1973345440 title "Model studies of low temperature titanium nitride thin film growth" @default.
• W1973345440 cites W1967774028 @default.
• W1973345440 cites W1967910593 @default.
• W1973345440 cites W1972980261 @default.
• W1973345440 cites W1978051259 @default.
• W1973345440 cites W1989705149 @default.
• W1973345440 cites W1992871005 @default.
• W1973345440 cites W1998676142 @default.
• W1973345440 cites W2001815210 @default.
• W1973345440 cites W2002651922 @default.
• W1973345440 cites W2008160151 @default.
• W1973345440 cites W2012582669 @default.
• W1973345440 cites W2018657652 @default.
• W1973345440 cites W2019371136 @default.
• W1973345440 cites W2024189071 @default.
• W1973345440 cites W2035881471 @default.
• W1973345440 cites W2041062085 @default.
• W1973345440 cites W2047956112 @default.
• W1973345440 cites W2052128733 @default.
• W1973345440 cites W2060842261 @default.
• W1973345440 cites W2064120059 @default.
• W1973345440 cites W2066637022 @default.
• W1973345440 cites W2068126009 @default.
• W1973345440 cites W2070928426 @default.
• W1973345440 cites W2074981880 @default.
• W1973345440 cites W2076168474 @default.
• W1973345440 cites W2079084012 @default.
• W1973345440 cites W2083599374 @default.
• W1973345440 cites W2085565227 @default.
• W1973345440 cites W2087607142 @default.
• W1973345440 cites W2089140538 @default.
• W1973345440 cites W2111647156 @default.
• W1973345440 cites W2129195920 @default.
• W1973345440 cites W2156056979 @default.
• W1973345440 cites W2161111533 @default.
• W1973345440 cites W2319810075 @default.
• W1973345440 cites W2331665553 @default.
• W1973345440 cites W2949601458 @default.
• W1973345440 cites W2952272388 @default.
• W1973345440 cites W2953459466 @default.
• W1973345440 cites W3137736419 @default.
• W1973345440 doi "https://doi.org/10.1016/s0277-5387(00)80266-1" @default.
• W1973345440 hasPublicationYear "1994" @default.
• W1973345440 type Work @default.
• W1973345440 sameAs 1973345440 @default.
• W1973345440 citedByCount "65" @default.
• W1973345440 countsByYear W19733454402012 @default.
• W1973345440 countsByYear W19733454402013 @default.
• W1973345440 countsByYear W19733454402014 @default.
• W1973345440 countsByYear W19733454402015 @default.
• W1973345440 countsByYear W19733454402018 @default.
• W1973345440 crossrefType "journal-article" @default.
• W1973345440 hasAuthorship W1973345440A5007657025 @default.
• W1973345440 hasConcept C121332964 @default.
• W1973345440 hasConcept C171250308 @default.
• W1973345440 hasConcept C178790620 @default.
• W1973345440 hasConcept C179104552 @default.
• W1973345440 hasConcept C185592680 @default.
• W1973345440 hasConcept C19067145 @default.
• W1973345440 hasConcept C192562407 @default.
• W1973345440 hasConcept C194760766 @default.
• W1973345440 hasConcept C2776382133 @default.
• W1973345440 hasConcept C2777510880 @default.
• W1973345440 hasConcept C2778489163 @default.
• W1973345440 hasConcept C2779227376 @default.
• W1973345440 hasConcept C2780825948 @default.
• W1973345440 hasConcept C506065880 @default.
• W1973345440 hasConcept C525849907 @default.
• W1973345440 hasConcept C537208039 @default.
• W1973345440 hasConcept C58364064 @default.
• W1973345440 hasConcept C62520636 @default.
• W1973345440 hasConceptScore W1973345440C121332964 @default.
• W1973345440 hasConceptScore W1973345440C171250308 @default.
• W1973345440 hasConceptScore W1973345440C178790620 @default.
• W1973345440 hasConceptScore W1973345440C179104552 @default.
• W1973345440 hasConceptScore W1973345440C185592680 @default.
• W1973345440 hasConceptScore W1973345440C19067145 @default.
• W1973345440 hasConceptScore W1973345440C192562407 @default.
• W1973345440 hasConceptScore W1973345440C194760766 @default.
• W1973345440 hasConceptScore W1973345440C2776382133 @default.
• W1973345440 hasConceptScore W1973345440C2777510880 @default.
• W1973345440 hasConceptScore W1973345440C2778489163 @default.
• W1973345440 hasConceptScore W1973345440C2779227376 @default.
• W1973345440 hasConceptScore W1973345440C2780825948 @default.
• W1973345440 hasConceptScore W1973345440C506065880 @default.
• W1973345440 hasConceptScore W1973345440C525849907 @default.
• W1973345440 hasConceptScore W1973345440C537208039 @default.
• W1973345440 hasConceptScore W1973345440C58364064 @default.
• W1973345440 hasConceptScore W1973345440C62520636 @default.
• W1973345440 hasIssue "8" @default.
• W1973345440 hasLocation W19733454401 @default.
• W1973345440 hasOpenAccess W1973345440 @default.
• W1973345440 hasPrimaryLocation W19733454401 @default.

• next