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- W1973419782 abstract "This paper puts forward an in-situ testing method for the mechanical properties of TSV copper pillar by using micro-compression experiment. The sample for micro-compression test is prepared by the processes as follows: (a) etching TSV with deep reactive ion etching (DRIE), (b) sputtering a layer of Ti/Cu as the seed layer, (c) TSV copper plating technology, and (d) corroding the silicon to obtain the final specimen. The micro compression test is done with a micro-compression system, consisting of a three-dimensional adjustable stage, a microscope, a force sensor, and a piezoelectric motor. The experimental results show that the platform can test TSV copper pillar’s stress, the accuracy is reached mN. The yield strength of TSV copper pillar is about 199.89 MPa." @default.
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- W1973419782 date "2013-02-01" @default.
- W1973419782 modified "2023-09-26" @default.
- W1973419782 title "Micro-Compression Testing of TSV Copper Pillar: An <i>In Situ</i> Method and Mechanical Property" @default.
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- W1973419782 doi "https://doi.org/10.4028/www.scientific.net/amr.663.352" @default.
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