FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1973445974> ?p ?o ?g. }

• W1973445974 endingPage "1660" @default.
• W1973445974 startingPage "1656" @default.
• W1973445974 abstract "The native oxide removal, surface termination, and stoichiometry of InGaAs(1 0 0) surfaces using liquid and gas phase HF/H2O etching were studied using X-ray photoelectron spectroscopy. Oxide removal in liquid phase HF stopped at the As layer, producing either elemental or H-terminated As. The surface oxidized upon air exposure, forming a 4.8 Å As2O3 layer on an As rich InGaAs sub-surface (17% In, 16% Ga, 66% As). A sub atmospheric gas phase HF/H2O process (100 Torr, 29 °C, 0.5 min) completely removed As2O3 and produced mainly In and Ga fluorides, since As fluoride is volatile at these experimental conditions. Once enough F accumulated on the surface, the water sticking probability decreased and the etching reaction proceeded at a much lower rate. The highest oxide removal (4.2 Å residual oxide) was achieved after 5 min of etching. As2O3 and As2O5 were completely removed and considerably more InF3 and GaF3 were produced. The surface contained a group III-fluoride rich overlayer (34% In, 36% Ga) on a slightly As rich bulk (21% In, 21% Ga, and 58% As). The As rich InGaAs sub-surface produced with both liquid and the longer gas phase HF treatments is intrinsic to HF-InGaAs chemistry, although the oxide removal mechanism is likely different." @default.
• W1973445974 created "2016-06-24" @default.
• W1973445974 creator A5039161378 @default.
• W1973445974 creator A5066810681 @default.
• W1973445974 creator A5083094047 @default.
• W1973445974 date "2010-11-01" @default.
• W1973445974 modified "2023-09-27" @default.
• W1973445974 title "In0.53Ga0.47As(100) native oxide removal by liquid and gas phase HF/H2O chemistries" @default.
• W1973445974 cites W1601659622 @default.
• W1973445974 cites W1616230297 @default.
• W1973445974 cites W1649187531 @default.
• W1973445974 cites W1990347647 @default.
• W1973445974 cites W1993143857 @default.
• W1973445974 cites W1997765179 @default.
• W1973445974 cites W1997832956 @default.
• W1973445974 cites W2000072240 @default.
• W1973445974 cites W2001765084 @default.
• W1973445974 cites W2003751381 @default.
• W1973445974 cites W2014295015 @default.
• W1973445974 cites W2017525076 @default.
• W1973445974 cites W2018966931 @default.
• W1973445974 cites W2021715758 @default.
• W1973445974 cites W2040662164 @default.
• W1973445974 cites W2068522731 @default.
• W1973445974 cites W2074386988 @default.
• W1973445974 cites W2086148421 @default.
• W1973445974 cites W2091770301 @default.
• W1973445974 cites W2313427395 @default.
• W1973445974 cites W4241475900 @default.
• W1973445974 doi "https://doi.org/10.1016/j.mee.2009.12.070" @default.
• W1973445974 hasPublicationYear "2010" @default.
• W1973445974 type Work @default.
• W1973445974 sameAs 1973445974 @default.
• W1973445974 citedByCount "18" @default.
• W1973445974 countsByYear W19734459742012 @default.
• W1973445974 countsByYear W19734459742014 @default.
• W1973445974 countsByYear W19734459742016 @default.
• W1973445974 countsByYear W19734459742017 @default.
• W1973445974 countsByYear W19734459742018 @default.
• W1973445974 countsByYear W19734459742019 @default.
• W1973445974 countsByYear W19734459742020 @default.
• W1973445974 countsByYear W19734459742021 @default.
• W1973445974 countsByYear W19734459742023 @default.
• W1973445974 crossrefType "journal-article" @default.
• W1973445974 hasAuthorship W1973445974A5039161378 @default.
• W1973445974 hasAuthorship W1973445974A5066810681 @default.
• W1973445974 hasAuthorship W1973445974A5083094047 @default.
• W1973445974 hasConcept C100460472 @default.
• W1973445974 hasConcept C113196181 @default.
• W1973445974 hasConcept C121285527 @default.
• W1973445974 hasConcept C121332964 @default.
• W1973445974 hasConcept C127413603 @default.
• W1973445974 hasConcept C130472188 @default.
• W1973445974 hasConcept C144082473 @default.
• W1973445974 hasConcept C147789679 @default.
• W1973445974 hasConcept C175708663 @default.
• W1973445974 hasConcept C178790620 @default.
• W1973445974 hasConcept C179104552 @default.
• W1973445974 hasConcept C185592680 @default.
• W1973445974 hasConcept C2775913835 @default.
• W1973445974 hasConcept C2776967294 @default.
• W1973445974 hasConcept C2779227376 @default.
• W1973445974 hasConcept C2779851234 @default.
• W1973445974 hasConcept C2780828025 @default.
• W1973445974 hasConcept C30646810 @default.
• W1973445974 hasConcept C42360764 @default.
• W1973445974 hasConcept C43617362 @default.
• W1973445974 hasConcept C44280652 @default.
• W1973445974 hasConcept C97355855 @default.
• W1973445974 hasConceptScore W1973445974C100460472 @default.
• W1973445974 hasConceptScore W1973445974C113196181 @default.
• W1973445974 hasConceptScore W1973445974C121285527 @default.
• W1973445974 hasConceptScore W1973445974C121332964 @default.
• W1973445974 hasConceptScore W1973445974C127413603 @default.
• W1973445974 hasConceptScore W1973445974C130472188 @default.
• W1973445974 hasConceptScore W1973445974C144082473 @default.
• W1973445974 hasConceptScore W1973445974C147789679 @default.
• W1973445974 hasConceptScore W1973445974C175708663 @default.
• W1973445974 hasConceptScore W1973445974C178790620 @default.
• W1973445974 hasConceptScore W1973445974C179104552 @default.
• W1973445974 hasConceptScore W1973445974C185592680 @default.
• W1973445974 hasConceptScore W1973445974C2775913835 @default.
• W1973445974 hasConceptScore W1973445974C2776967294 @default.
• W1973445974 hasConceptScore W1973445974C2779227376 @default.
• W1973445974 hasConceptScore W1973445974C2779851234 @default.
• W1973445974 hasConceptScore W1973445974C2780828025 @default.
• W1973445974 hasConceptScore W1973445974C30646810 @default.
• W1973445974 hasConceptScore W1973445974C42360764 @default.
• W1973445974 hasConceptScore W1973445974C43617362 @default.
• W1973445974 hasConceptScore W1973445974C44280652 @default.
• W1973445974 hasConceptScore W1973445974C97355855 @default.
• W1973445974 hasIssue "9" @default.
• W1973445974 hasLocation W19734459741 @default.
• W1973445974 hasOpenAccess W1973445974 @default.
• W1973445974 hasPrimaryLocation W19734459741 @default.
• W1973445974 hasRelatedWork W1965881882 @default.
• W1973445974 hasRelatedWork W1996883039 @default.
• W1973445974 hasRelatedWork W2007694709 @default.

• next