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- W1973458889 abstract "This article presents a new approach to the design of confocal differential heterodyne interferometer (CDHI), which is a combination of differential heterodyne interferometer (DHI) with confocal laser scanning microscopy (CLSM). The CDHI can measure a step height over a quarter of wavelength of the light source, which can not be accurately measured by DHI and CLSM, respectively. The approach is that it utilizes a beam-scanning method instead of transporting a sample to be measured. The measurement results carried out for samples having step height are found to be comparable in precision with those measured by commercial scanning electron microscopes." @default.
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- W1973458889 date "2007-03-30" @default.
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- W1973458889 title "Beam Scanning Confocal Differential Heterodyne Interferometry" @default.
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- W1973458889 doi "https://doi.org/10.1080/15599610701261076" @default.
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