Matches in SemOpenAlex for { <https://semopenalex.org/work/W1973553514> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W1973553514 endingPage "L256" @default.
- W1973553514 startingPage "L254" @default.
- W1973553514 abstract "An infrared differential interference contrast method using a YLF laser (1.3 μm) was used to evaluate the surface roughness of polished silicon wafers and wafers oxidized at 700, 900, and 1000°C. For polished wafers, the root‐mean‐square optical phase shifts (Δϕrms) from this method exhibit a nonlinear relation with the average roughness, Ra, obtained by a conventional laser interferometry technique. The surface roughness of the thermally oxidized wafers is found to have a nonmonotonic trend that evolves with time. This trend is also dependent on the oxidation temperature." @default.
- W1973553514 created "2016-06-24" @default.
- W1973553514 creator A5011633439 @default.
- W1973553514 creator A5012320409 @default.
- W1973553514 creator A5029436452 @default.
- W1973553514 date "1996-11-01" @default.
- W1973553514 modified "2023-09-24" @default.
- W1973553514 title "Surface and Interfacial Roughness of Polished and Oxidized Silicon Wafers Evaluated by an Infrared Differential Interference Contrast Technique" @default.
- W1973553514 doi "https://doi.org/10.1149/1.1837224" @default.
- W1973553514 hasPublicationYear "1996" @default.
- W1973553514 type Work @default.
- W1973553514 sameAs 1973553514 @default.
- W1973553514 citedByCount "0" @default.
- W1973553514 crossrefType "journal-article" @default.
- W1973553514 hasAuthorship W1973553514A5011633439 @default.
- W1973553514 hasAuthorship W1973553514A5012320409 @default.
- W1973553514 hasAuthorship W1973553514A5029436452 @default.
- W1973553514 hasConcept C107365816 @default.
- W1973553514 hasConcept C109986877 @default.
- W1973553514 hasConcept C119599485 @default.
- W1973553514 hasConcept C120665830 @default.
- W1973553514 hasConcept C121332964 @default.
- W1973553514 hasConcept C127162648 @default.
- W1973553514 hasConcept C127413603 @default.
- W1973553514 hasConcept C147080431 @default.
- W1973553514 hasConcept C158355884 @default.
- W1973553514 hasConcept C159985019 @default.
- W1973553514 hasConcept C160671074 @default.
- W1973553514 hasConcept C166689943 @default.
- W1973553514 hasConcept C192562407 @default.
- W1973553514 hasConcept C32022120 @default.
- W1973553514 hasConcept C49040817 @default.
- W1973553514 hasConcept C520434653 @default.
- W1973553514 hasConcept C544956773 @default.
- W1973553514 hasConcept C71039073 @default.
- W1973553514 hasConcept C71907059 @default.
- W1973553514 hasConcept C79261456 @default.
- W1973553514 hasConceptScore W1973553514C107365816 @default.
- W1973553514 hasConceptScore W1973553514C109986877 @default.
- W1973553514 hasConceptScore W1973553514C119599485 @default.
- W1973553514 hasConceptScore W1973553514C120665830 @default.
- W1973553514 hasConceptScore W1973553514C121332964 @default.
- W1973553514 hasConceptScore W1973553514C127162648 @default.
- W1973553514 hasConceptScore W1973553514C127413603 @default.
- W1973553514 hasConceptScore W1973553514C147080431 @default.
- W1973553514 hasConceptScore W1973553514C158355884 @default.
- W1973553514 hasConceptScore W1973553514C159985019 @default.
- W1973553514 hasConceptScore W1973553514C160671074 @default.
- W1973553514 hasConceptScore W1973553514C166689943 @default.
- W1973553514 hasConceptScore W1973553514C192562407 @default.
- W1973553514 hasConceptScore W1973553514C32022120 @default.
- W1973553514 hasConceptScore W1973553514C49040817 @default.
- W1973553514 hasConceptScore W1973553514C520434653 @default.
- W1973553514 hasConceptScore W1973553514C544956773 @default.
- W1973553514 hasConceptScore W1973553514C71039073 @default.
- W1973553514 hasConceptScore W1973553514C71907059 @default.
- W1973553514 hasConceptScore W1973553514C79261456 @default.
- W1973553514 hasIssue "11" @default.
- W1973553514 hasLocation W19735535141 @default.
- W1973553514 hasOpenAccess W1973553514 @default.
- W1973553514 hasPrimaryLocation W19735535141 @default.
- W1973553514 hasRelatedWork W1965057529 @default.
- W1973553514 hasRelatedWork W1966848192 @default.
- W1973553514 hasRelatedWork W1973553514 @default.
- W1973553514 hasRelatedWork W1990721104 @default.
- W1973553514 hasRelatedWork W2064726292 @default.
- W1973553514 hasRelatedWork W2071236162 @default.
- W1973553514 hasRelatedWork W2087938339 @default.
- W1973553514 hasRelatedWork W2133180509 @default.
- W1973553514 hasRelatedWork W2397608797 @default.
- W1973553514 hasRelatedWork W3087376282 @default.
- W1973553514 hasVolume "143" @default.
- W1973553514 isParatext "false" @default.
- W1973553514 isRetracted "false" @default.
- W1973553514 magId "1973553514" @default.
- W1973553514 workType "article" @default.