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- W1973556875 abstract "We describe the reliability evaluation for MEMS devices, especially designed for DVD (Digital Video Disk) and CD compatible application module. These MEMS devices are fabricated as a mirror plane (shutter plane) used in DVD or CD data picking up. This micromachined annular shutter mirror (ASM) acts as an adjusting means of the numerical aperture. The electrostatic force can drive the upper plane up and down for focusing or defocusing of incident laser beam to the selected recording plane. So we need to evaluate the micromechanical properties of thin film structural materials to ensure the reliability of those MEMS devices. For those, we perform the fatigue tests onto the devices in the conditions of much accelerated than those of normal driving. The applied electrostatic force can induce the change of the thin film properties, and those are observed by direct and indirect methods. And then, we compare the fatigue effects with electrical, optical data from the intentionally-fatigue- applied specimen and as-fabricated one under accelerated conditions. Microstructure changes are able to explain the fatigue effects through observing the crack initiation, propagation, and its size around stress concentration region of metal mirror plane. Consequently, we can estimate the structural reliability and will provide the effective suggestion data for the fabrication of stable mirror material before commercialization." @default.
- W1973556875 created "2016-06-24" @default.
- W1973556875 creator A5036700956 @default.
- W1973556875 creator A5058324802 @default.
- W1973556875 creator A5072124738 @default.
- W1973556875 date "1999-09-02" @default.
- W1973556875 modified "2023-09-23" @default.
- W1973556875 title "<title>Micromechanical reliability evaluation of mirror devices through applying accelerated electrostatic force</title>" @default.
- W1973556875 doi "https://doi.org/10.1117/12.361251" @default.
- W1973556875 hasPublicationYear "1999" @default.
- W1973556875 type Work @default.
- W1973556875 sameAs 1973556875 @default.
- W1973556875 citedByCount "2" @default.
- W1973556875 crossrefType "proceedings-article" @default.
- W1973556875 hasAuthorship W1973556875A5036700956 @default.
- W1973556875 hasAuthorship W1973556875A5058324802 @default.
- W1973556875 hasAuthorship W1973556875A5072124738 @default.
- W1973556875 hasConcept C120665830 @default.
- W1973556875 hasConcept C121332964 @default.
- W1973556875 hasConcept C127413603 @default.
- W1973556875 hasConcept C136525101 @default.
- W1973556875 hasConcept C138885662 @default.
- W1973556875 hasConcept C142724271 @default.
- W1973556875 hasConcept C163258240 @default.
- W1973556875 hasConcept C17825722 @default.
- W1973556875 hasConcept C192562407 @default.
- W1973556875 hasConcept C204787440 @default.
- W1973556875 hasConcept C21036866 @default.
- W1973556875 hasConcept C2524010 @default.
- W1973556875 hasConcept C2776871301 @default.
- W1973556875 hasConcept C33923547 @default.
- W1973556875 hasConcept C37977207 @default.
- W1973556875 hasConcept C41008148 @default.
- W1973556875 hasConcept C41895202 @default.
- W1973556875 hasConcept C43214815 @default.
- W1973556875 hasConcept C49040817 @default.
- W1973556875 hasConcept C62520636 @default.
- W1973556875 hasConcept C71924100 @default.
- W1973556875 hasConcept C78336883 @default.
- W1973556875 hasConcept C78519656 @default.
- W1973556875 hasConceptScore W1973556875C120665830 @default.
- W1973556875 hasConceptScore W1973556875C121332964 @default.
- W1973556875 hasConceptScore W1973556875C127413603 @default.
- W1973556875 hasConceptScore W1973556875C136525101 @default.
- W1973556875 hasConceptScore W1973556875C138885662 @default.
- W1973556875 hasConceptScore W1973556875C142724271 @default.
- W1973556875 hasConceptScore W1973556875C163258240 @default.
- W1973556875 hasConceptScore W1973556875C17825722 @default.
- W1973556875 hasConceptScore W1973556875C192562407 @default.
- W1973556875 hasConceptScore W1973556875C204787440 @default.
- W1973556875 hasConceptScore W1973556875C21036866 @default.
- W1973556875 hasConceptScore W1973556875C2524010 @default.
- W1973556875 hasConceptScore W1973556875C2776871301 @default.
- W1973556875 hasConceptScore W1973556875C33923547 @default.
- W1973556875 hasConceptScore W1973556875C37977207 @default.
- W1973556875 hasConceptScore W1973556875C41008148 @default.
- W1973556875 hasConceptScore W1973556875C41895202 @default.
- W1973556875 hasConceptScore W1973556875C43214815 @default.
- W1973556875 hasConceptScore W1973556875C49040817 @default.
- W1973556875 hasConceptScore W1973556875C62520636 @default.
- W1973556875 hasConceptScore W1973556875C71924100 @default.
- W1973556875 hasConceptScore W1973556875C78336883 @default.
- W1973556875 hasConceptScore W1973556875C78519656 @default.
- W1973556875 hasLocation W19735568751 @default.
- W1973556875 hasOpenAccess W1973556875 @default.
- W1973556875 hasPrimaryLocation W19735568751 @default.
- W1973556875 hasRelatedWork W1972153524 @default.
- W1973556875 hasRelatedWork W2013269189 @default.
- W1973556875 hasRelatedWork W2015840403 @default.
- W1973556875 hasRelatedWork W2021552737 @default.
- W1973556875 hasRelatedWork W2021687945 @default.
- W1973556875 hasRelatedWork W2052619421 @default.
- W1973556875 hasRelatedWork W2899084033 @default.
- W1973556875 hasRelatedWork W358558534 @default.
- W1973556875 hasRelatedWork W45761799 @default.
- W1973556875 hasRelatedWork W2153247450 @default.
- W1973556875 isParatext "false" @default.
- W1973556875 isRetracted "false" @default.
- W1973556875 magId "1973556875" @default.
- W1973556875 workType "article" @default.