Matches in SemOpenAlex for { <https://semopenalex.org/work/W1973573011> ?p ?o ?g. }
- W1973573011 endingPage "112" @default.
- W1973573011 startingPage "108" @default.
- W1973573011 abstract "We have deposited indium oxide (In2O3) films on silicon substrates by the metal organic chemical vapor deposition (MOCVD). We have investigated the effect of substrate temperature on growth and structural properties of films in the range of 200–300 °C. The films had a preferred orientation along [111] direction, with the X-ray diffraction (XRD) full width at half-maximum (FWHM) of less than 0.4°." @default.
- W1973573011 created "2016-06-24" @default.
- W1973573011 creator A5000134894 @default.
- W1973573011 creator A5042638041 @default.
- W1973573011 creator A5047960213 @default.
- W1973573011 creator A5067339652 @default.
- W1973573011 date "2005-01-01" @default.
- W1973573011 modified "2023-09-26" @default.
- W1973573011 title "Growth of In<sub>2</sub>O<sub>3</sub>thin films on silicon by the metalorganic chemical vapor deposition method" @default.
- W1973573011 cites W1969784820 @default.
- W1973573011 cites W1973440137 @default.
- W1973573011 cites W1976344952 @default.
- W1973573011 cites W1986692926 @default.
- W1973573011 cites W1986965566 @default.
- W1973573011 cites W1994532055 @default.
- W1973573011 cites W2001748776 @default.
- W1973573011 cites W2014154385 @default.
- W1973573011 cites W2016356540 @default.
- W1973573011 cites W2018392909 @default.
- W1973573011 cites W2019768807 @default.
- W1973573011 cites W2021757185 @default.
- W1973573011 cites W2029512125 @default.
- W1973573011 cites W2035194820 @default.
- W1973573011 cites W2041438810 @default.
- W1973573011 cites W2045493767 @default.
- W1973573011 cites W2060912384 @default.
- W1973573011 cites W2070023439 @default.
- W1973573011 cites W2072550932 @default.
- W1973573011 cites W2085483024 @default.
- W1973573011 cites W2085688760 @default.
- W1973573011 cites W2087265642 @default.
- W1973573011 cites W2094953202 @default.
- W1973573011 cites W2101099203 @default.
- W1973573011 cites W2117978788 @default.
- W1973573011 cites W2119708466 @default.
- W1973573011 doi "https://doi.org/10.1002/pssa.200406916" @default.
- W1973573011 hasPublicationYear "2005" @default.
- W1973573011 type Work @default.
- W1973573011 sameAs 1973573011 @default.
- W1973573011 citedByCount "20" @default.
- W1973573011 countsByYear W19735730112015 @default.
- W1973573011 countsByYear W19735730112017 @default.
- W1973573011 countsByYear W19735730112018 @default.
- W1973573011 countsByYear W19735730112019 @default.
- W1973573011 countsByYear W19735730112021 @default.
- W1973573011 countsByYear W19735730112022 @default.
- W1973573011 crossrefType "journal-article" @default.
- W1973573011 hasAuthorship W1973573011A5000134894 @default.
- W1973573011 hasAuthorship W1973573011A5042638041 @default.
- W1973573011 hasAuthorship W1973573011A5047960213 @default.
- W1973573011 hasAuthorship W1973573011A5067339652 @default.
- W1973573011 hasConcept C108649604 @default.
- W1973573011 hasConcept C110738630 @default.
- W1973573011 hasConcept C111368507 @default.
- W1973573011 hasConcept C113196181 @default.
- W1973573011 hasConcept C120665830 @default.
- W1973573011 hasConcept C121332964 @default.
- W1973573011 hasConcept C127313418 @default.
- W1973573011 hasConcept C151730666 @default.
- W1973573011 hasConcept C153294291 @default.
- W1973573011 hasConcept C171250308 @default.
- W1973573011 hasConcept C175665537 @default.
- W1973573011 hasConcept C178790620 @default.
- W1973573011 hasConcept C183866003 @default.
- W1973573011 hasConcept C185592680 @default.
- W1973573011 hasConcept C19067145 @default.
- W1973573011 hasConcept C191897082 @default.
- W1973573011 hasConcept C192562407 @default.
- W1973573011 hasConcept C207114421 @default.
- W1973573011 hasConcept C2777289219 @default.
- W1973573011 hasConcept C2779227376 @default.
- W1973573011 hasConcept C2779851234 @default.
- W1973573011 hasConcept C2816523 @default.
- W1973573011 hasConcept C39353612 @default.
- W1973573011 hasConcept C49040817 @default.
- W1973573011 hasConcept C543292547 @default.
- W1973573011 hasConcept C544956773 @default.
- W1973573011 hasConcept C57410435 @default.
- W1973573011 hasConcept C64297162 @default.
- W1973573011 hasConcept C75937256 @default.
- W1973573011 hasConcept C86803240 @default.
- W1973573011 hasConceptScore W1973573011C108649604 @default.
- W1973573011 hasConceptScore W1973573011C110738630 @default.
- W1973573011 hasConceptScore W1973573011C111368507 @default.
- W1973573011 hasConceptScore W1973573011C113196181 @default.
- W1973573011 hasConceptScore W1973573011C120665830 @default.
- W1973573011 hasConceptScore W1973573011C121332964 @default.
- W1973573011 hasConceptScore W1973573011C127313418 @default.
- W1973573011 hasConceptScore W1973573011C151730666 @default.
- W1973573011 hasConceptScore W1973573011C153294291 @default.
- W1973573011 hasConceptScore W1973573011C171250308 @default.
- W1973573011 hasConceptScore W1973573011C175665537 @default.
- W1973573011 hasConceptScore W1973573011C178790620 @default.
- W1973573011 hasConceptScore W1973573011C183866003 @default.
- W1973573011 hasConceptScore W1973573011C185592680 @default.
- W1973573011 hasConceptScore W1973573011C19067145 @default.
- W1973573011 hasConceptScore W1973573011C191897082 @default.
- W1973573011 hasConceptScore W1973573011C192562407 @default.