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• W1973609935 endingPage "1361" @default.
• W1973609935 startingPage "1359" @default.
• W1973609935 abstract "In order to fabricate precise atomic-scale devices in silicon using a combination of scanning tunnelling microscopy (STM) and molecular beam epitaxy it is necessary to minimize the segregation/diffusion of dopant atoms during silicon encapsulation. We characterize the surface segregation/diffusion of phosphorus atoms from a $delta$-doped layer in silicon after encapsulation at 250$^{circ}$C and room temperature using secondary ion mass spectrometry (SIMS), Auger electron spectroscopy (AES), and STM. We show that the surface phosphorus density can be reduced to a few percent of the initial $delta$-doped density if the phosphorus atoms are encapsulated with 5 or 10 monolayers of epitaxial silicon at room temperature. We highlight the limitations of SIMS and AES to determine phosphorus segregation at the atomic-scale and the advantage of using STM directly." @default.
• W1973609935 created "2016-06-24" @default.
• W1973609935 creator A5001429131 @default.
• W1973609935 creator A5031372035 @default.
• W1973609935 creator A5037903713 @default.
• W1973609935 creator A5037911071 @default.
• W1973609935 creator A5049405877 @default.
• W1973609935 creator A5072839814 @default.
• W1973609935 date "2004-08-23" @default.
• W1973609935 modified "2023-09-23" @default.
• W1973609935 title "Measurement of phosphorus segregation in silicon at the atomic scale using scanning tunneling microscopy" @default.
• W1973609935 cites W1969703266 @default.
• W1973609935 cites W1970788888 @default.
• W1973609935 cites W1978484424 @default.
• W1973609935 cites W2048420322 @default.
• W1973609935 cites W2063234164 @default.
• W1973609935 cites W2077994487 @default.
• W1973609935 cites W2079182757 @default.
• W1973609935 cites W2094261103 @default.
• W1973609935 doi "https://doi.org/10.1063/1.1784881" @default.
• W1973609935 hasPublicationYear "2004" @default.
• W1973609935 type Work @default.
• W1973609935 sameAs 1973609935 @default.
• W1973609935 citedByCount "53" @default.
• W1973609935 countsByYear W19736099352012 @default.
• W1973609935 countsByYear W19736099352013 @default.
• W1973609935 countsByYear W19736099352014 @default.
• W1973609935 countsByYear W19736099352015 @default.
• W1973609935 countsByYear W19736099352017 @default.
• W1973609935 countsByYear W19736099352018 @default.
• W1973609935 countsByYear W19736099352019 @default.
• W1973609935 countsByYear W19736099352020 @default.
• W1973609935 countsByYear W19736099352021 @default.
• W1973609935 countsByYear W19736099352023 @default.
• W1973609935 crossrefType "journal-article" @default.
• W1973609935 hasAuthorship W1973609935A5001429131 @default.
• W1973609935 hasAuthorship W1973609935A5031372035 @default.
• W1973609935 hasAuthorship W1973609935A5037903713 @default.
• W1973609935 hasAuthorship W1973609935A5037911071 @default.
• W1973609935 hasAuthorship W1973609935A5049405877 @default.
• W1973609935 hasAuthorship W1973609935A5072839814 @default.
• W1973609935 hasBestOaLocation W19736099352 @default.
• W1973609935 hasConcept C110738630 @default.
• W1973609935 hasConcept C113196181 @default.
• W1973609935 hasConcept C121332964 @default.
• W1973609935 hasConcept C145148216 @default.
• W1973609935 hasConcept C147789679 @default.
• W1973609935 hasConcept C150394285 @default.
• W1973609935 hasConcept C15696416 @default.
• W1973609935 hasConcept C159985019 @default.
• W1973609935 hasConcept C171250308 @default.
• W1973609935 hasConcept C178790620 @default.
• W1973609935 hasConcept C185544564 @default.
• W1973609935 hasConcept C185592680 @default.
• W1973609935 hasConcept C191952053 @default.
• W1973609935 hasConcept C192562407 @default.
• W1973609935 hasConcept C194577767 @default.
• W1973609935 hasConcept C25442681 @default.
• W1973609935 hasConcept C26771246 @default.
• W1973609935 hasConcept C2779227376 @default.
• W1973609935 hasConcept C3792809 @default.
• W1973609935 hasConcept C43617362 @default.
• W1973609935 hasConcept C49040817 @default.
• W1973609935 hasConcept C544956773 @default.
• W1973609935 hasConcept C57863236 @default.
• W1973609935 hasConcept C62520636 @default.
• W1973609935 hasConcept C6518042 @default.
• W1973609935 hasConcept C66823137 @default.
• W1973609935 hasConcept C7070889 @default.
• W1973609935 hasConcept C77671233 @default.
• W1973609935 hasConceptScore W1973609935C110738630 @default.
• W1973609935 hasConceptScore W1973609935C113196181 @default.
• W1973609935 hasConceptScore W1973609935C121332964 @default.
• W1973609935 hasConceptScore W1973609935C145148216 @default.
• W1973609935 hasConceptScore W1973609935C147789679 @default.
• W1973609935 hasConceptScore W1973609935C150394285 @default.
• W1973609935 hasConceptScore W1973609935C15696416 @default.
• W1973609935 hasConceptScore W1973609935C159985019 @default.
• W1973609935 hasConceptScore W1973609935C171250308 @default.
• W1973609935 hasConceptScore W1973609935C178790620 @default.
• W1973609935 hasConceptScore W1973609935C185544564 @default.
• W1973609935 hasConceptScore W1973609935C185592680 @default.
• W1973609935 hasConceptScore W1973609935C191952053 @default.
• W1973609935 hasConceptScore W1973609935C192562407 @default.
• W1973609935 hasConceptScore W1973609935C194577767 @default.
• W1973609935 hasConceptScore W1973609935C25442681 @default.
• W1973609935 hasConceptScore W1973609935C26771246 @default.
• W1973609935 hasConceptScore W1973609935C2779227376 @default.
• W1973609935 hasConceptScore W1973609935C3792809 @default.
• W1973609935 hasConceptScore W1973609935C43617362 @default.
• W1973609935 hasConceptScore W1973609935C49040817 @default.
• W1973609935 hasConceptScore W1973609935C544956773 @default.
• W1973609935 hasConceptScore W1973609935C57863236 @default.
• W1973609935 hasConceptScore W1973609935C62520636 @default.
• W1973609935 hasConceptScore W1973609935C6518042 @default.
• W1973609935 hasConceptScore W1973609935C66823137 @default.
• W1973609935 hasConceptScore W1973609935C7070889 @default.
• W1973609935 hasConceptScore W1973609935C77671233 @default.

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