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- W1973669402 abstract "Phosphorus and arsenic ion‐implanted in silicon, and sulfur and silicon ion‐implanted in gallium arsenide have been depth‐profiled by secondary ion mass spectrometry down to concentration limits of . This was accomplished by monitoring negatively charged secondary ions produced by cesium positive ion bombardment. Contamination from the vacuum system was avoided by performing all analyses at pressures of ." @default.
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- W1973669402 date "1979-04-01" @default.
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- W1973669402 title "Depth Profiling of n‐Type Dopants in Si and GaAs Using Cs+ Bombardment Negative Secondary Ion Mass Spectrometry in Ultrahigh Vacuum" @default.
- W1973669402 doi "https://doi.org/10.1149/1.2129104" @default.
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