Matches in SemOpenAlex for { <https://semopenalex.org/work/W1973705482> ?p ?o ?g. }
- W1973705482 endingPage "469" @default.
- W1973705482 startingPage "465" @default.
- W1973705482 abstract "A round-robin study of arsenic depth profiling was conducted by Japanese SIMS users using arsenic-implanted silicon specimens with doses of 3×1014 to 3×1016 ions/cm2. The peak concentration of the implanted arsenic was about 11 at.% for the specimen with the dose of 3×1016 ions/cm2. The shape of arsenic ion (AsSi− and As−) profiles was not affected by the incident angle of Cs+ primary ion. The RSFs calculated from AsSi−/Si2− and As−/Si− by point-by-point normalization were constant against arsenic doses. No dependence of RSFs on the angle of primary ion incidence was observed. Using an AsSi−/Si2− or As−/Si− point-by-point calibration method, arsenic with high concentration (11 at.%) in silicon can be quantitatively evaluated without being interfered by its matrix effect." @default.
- W1973705482 created "2016-06-24" @default.
- W1973705482 creator A5002451788 @default.
- W1973705482 creator A5004756506 @default.
- W1973705482 creator A5009642070 @default.
- W1973705482 creator A5009656303 @default.
- W1973705482 creator A5011116647 @default.
- W1973705482 creator A5025915233 @default.
- W1973705482 creator A5027252222 @default.
- W1973705482 creator A5029735117 @default.
- W1973705482 creator A5030303042 @default.
- W1973705482 creator A5030605583 @default.
- W1973705482 creator A5033849240 @default.
- W1973705482 creator A5038286776 @default.
- W1973705482 creator A5043767398 @default.
- W1973705482 creator A5049933786 @default.
- W1973705482 creator A5050516034 @default.
- W1973705482 creator A5055840872 @default.
- W1973705482 creator A5056714217 @default.
- W1973705482 creator A5058005792 @default.
- W1973705482 creator A5066400160 @default.
- W1973705482 creator A5080510255 @default.
- W1973705482 creator A5087510484 @default.
- W1973705482 creator A5090958165 @default.
- W1973705482 date "2003-01-01" @default.
- W1973705482 modified "2023-09-27" @default.
- W1973705482 title "SIMS round-robin study of depth profiling of arsenic implants in silicon" @default.
- W1973705482 doi "https://doi.org/10.1016/s0169-4332(02)00702-x" @default.
- W1973705482 hasPublicationYear "2003" @default.
- W1973705482 type Work @default.
- W1973705482 sameAs 1973705482 @default.
- W1973705482 citedByCount "5" @default.
- W1973705482 crossrefType "journal-article" @default.
- W1973705482 hasAuthorship W1973705482A5002451788 @default.
- W1973705482 hasAuthorship W1973705482A5004756506 @default.
- W1973705482 hasAuthorship W1973705482A5009642070 @default.
- W1973705482 hasAuthorship W1973705482A5009656303 @default.
- W1973705482 hasAuthorship W1973705482A5011116647 @default.
- W1973705482 hasAuthorship W1973705482A5025915233 @default.
- W1973705482 hasAuthorship W1973705482A5027252222 @default.
- W1973705482 hasAuthorship W1973705482A5029735117 @default.
- W1973705482 hasAuthorship W1973705482A5030303042 @default.
- W1973705482 hasAuthorship W1973705482A5030605583 @default.
- W1973705482 hasAuthorship W1973705482A5033849240 @default.
- W1973705482 hasAuthorship W1973705482A5038286776 @default.
- W1973705482 hasAuthorship W1973705482A5043767398 @default.
- W1973705482 hasAuthorship W1973705482A5049933786 @default.
- W1973705482 hasAuthorship W1973705482A5050516034 @default.
- W1973705482 hasAuthorship W1973705482A5055840872 @default.
- W1973705482 hasAuthorship W1973705482A5056714217 @default.
- W1973705482 hasAuthorship W1973705482A5058005792 @default.
- W1973705482 hasAuthorship W1973705482A5066400160 @default.
- W1973705482 hasAuthorship W1973705482A5080510255 @default.
- W1973705482 hasAuthorship W1973705482A5087510484 @default.
- W1973705482 hasAuthorship W1973705482A5090958165 @default.
- W1973705482 hasConcept C107872376 @default.
- W1973705482 hasConcept C113196181 @default.
- W1973705482 hasConcept C119128265 @default.
- W1973705482 hasConcept C145148216 @default.
- W1973705482 hasConcept C178790620 @default.
- W1973705482 hasConcept C185592680 @default.
- W1973705482 hasConcept C191897082 @default.
- W1973705482 hasConcept C192562407 @default.
- W1973705482 hasConcept C23531484 @default.
- W1973705482 hasConcept C43617362 @default.
- W1973705482 hasConcept C502230775 @default.
- W1973705482 hasConcept C544956773 @default.
- W1973705482 hasConcept C77671233 @default.
- W1973705482 hasConceptScore W1973705482C107872376 @default.
- W1973705482 hasConceptScore W1973705482C113196181 @default.
- W1973705482 hasConceptScore W1973705482C119128265 @default.
- W1973705482 hasConceptScore W1973705482C145148216 @default.
- W1973705482 hasConceptScore W1973705482C178790620 @default.
- W1973705482 hasConceptScore W1973705482C185592680 @default.
- W1973705482 hasConceptScore W1973705482C191897082 @default.
- W1973705482 hasConceptScore W1973705482C192562407 @default.
- W1973705482 hasConceptScore W1973705482C23531484 @default.
- W1973705482 hasConceptScore W1973705482C43617362 @default.
- W1973705482 hasConceptScore W1973705482C502230775 @default.
- W1973705482 hasConceptScore W1973705482C544956773 @default.
- W1973705482 hasConceptScore W1973705482C77671233 @default.
- W1973705482 hasLocation W19737054821 @default.
- W1973705482 hasOpenAccess W1973705482 @default.
- W1973705482 hasPrimaryLocation W19737054821 @default.
- W1973705482 hasRelatedWork W119420651 @default.
- W1973705482 hasRelatedWork W1969732199 @default.
- W1973705482 hasRelatedWork W1985971041 @default.
- W1973705482 hasRelatedWork W2013576002 @default.
- W1973705482 hasRelatedWork W2057662999 @default.
- W1973705482 hasRelatedWork W2059534877 @default.
- W1973705482 hasRelatedWork W2072804448 @default.
- W1973705482 hasRelatedWork W2083272643 @default.
- W1973705482 hasRelatedWork W2526637554 @default.
- W1973705482 hasRelatedWork W3124015434 @default.
- W1973705482 hasVolume "203-204" @default.
- W1973705482 isParatext "false" @default.
- W1973705482 isRetracted "false" @default.
- W1973705482 magId "1973705482" @default.