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• W1973757666 abstract "This paper describes the development and characterization of a high-frequency (65-MHz) ultrasound transducer linear array. The array was built from bulk PZT which was etched using an optimized chlorine-based plasma dry-etching process. The median etch rate of 8 μm/h yielded a good profile (wall) angle (>;83°) and a reasonable processing time for etch depths up to 40 μm (which corresponds to a 50-MHz transducer). A backing layer with an acoustic impedance of 6 MRayl and a front-end polymer matching layer yielded a transducer bandwidth of 40%. The major parameters of the transducer have been characterized. The two-way insertion loss and crosstalk between adjacent channels at the center frequency are 26.5 and -25 dB, respectively." @default.
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• W1973757666 date "2012-02-01" @default.
• W1973757666 modified "2023-09-26" @default.
• W1973757666 title "High-frequency (>50 MHz) medical ultrasound linear arrays fabricated from micromachined bulk PZT materials" @default.
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• W1973757666 doi "https://doi.org/10.1109/tuffc.2012.2193" @default.
• W1973757666 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/3982855" @default.
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