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- W1973865614 abstract "Shading masks consisting of regular grids of thin metallic wires have been used for the vacuum deposition of micro- optical thin film components. The fabrication of cylindrical microlenses with single- and two-step procedures has been demonstrated. Refractive as well as partially reflective arrays with pitches greater than or equal to 50 micrometer have been realized with SiO<SUB>2</SUB> and SiO<SUB>2</SUB>:HfO<SUB>2</SUB> layers on glass, quartz and polymer substrates. The thickness profiles have been characterized interferometrically." @default.
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- W1973865614 date "1999-09-15" @default.
- W1973865614 modified "2023-09-23" @default.
- W1973865614 title "<title>Generation of thin film micro-optics by crossed deposition through wire-grid masks</title>" @default.
- W1973865614 doi "https://doi.org/10.1117/12.364294" @default.
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