Matches in SemOpenAlex for { <https://semopenalex.org/work/W1973946121> ?p ?o ?g. }
- W1973946121 endingPage "104" @default.
- W1973946121 startingPage "95" @default.
- W1973946121 abstract "The use of a high quality SrTiO 3 buffer layer was investigated in order to give access to the integration in standard silicon technology of KTa 1 − x Nb x O 3 thin films, grown by pulsed laser deposition. The buffer layer was previously epitaxially grown onto Si substrates by molecular beam epitaxy, using a process implying seed and sacrificial layers of strontium. The 40 nm thick SrTiO 3 underlayer acts together as a matching layer, a seed layer and an anti-diffusion barrier, preventing the formation of the undesired competing pyrochlore phase. High crystalline quality perovskite single-phase epitaxial KTa 1 − x Nb x O 3 thin films were reproducibly obtained by the use of this process." @default.
- W1973946121 created "2016-06-24" @default.
- W1973946121 creator A5032220356 @default.
- W1973946121 creator A5036612469 @default.
- W1973946121 creator A5037171049 @default.
- W1973946121 creator A5060707163 @default.
- W1973946121 creator A5071796635 @default.
- W1973946121 creator A5074033253 @default.
- W1973946121 creator A5085245412 @default.
- W1973946121 date "2008-05-19" @default.
- W1973946121 modified "2023-10-03" @default.
- W1973946121 title "Towards the Integration of Epitaxially Grown KTN Thin Films in Silicon Technology" @default.
- W1973946121 cites W1680481806 @default.
- W1973946121 cites W1984781048 @default.
- W1973946121 cites W1992745860 @default.
- W1973946121 cites W1999243913 @default.
- W1973946121 cites W2030203115 @default.
- W1973946121 cites W2032686743 @default.
- W1973946121 cites W2064102217 @default.
- W1973946121 cites W2065241713 @default.
- W1973946121 cites W2070993542 @default.
- W1973946121 cites W2072451721 @default.
- W1973946121 cites W2083036450 @default.
- W1973946121 cites W2100518004 @default.
- W1973946121 cites W2106005641 @default.
- W1973946121 cites W79922862 @default.
- W1973946121 doi "https://doi.org/10.1080/00150190802006319" @default.
- W1973946121 hasPublicationYear "2008" @default.
- W1973946121 type Work @default.
- W1973946121 sameAs 1973946121 @default.
- W1973946121 citedByCount "6" @default.
- W1973946121 countsByYear W19739461212013 @default.
- W1973946121 countsByYear W19739461212016 @default.
- W1973946121 countsByYear W19739461212020 @default.
- W1973946121 crossrefType "journal-article" @default.
- W1973946121 hasAuthorship W1973946121A5032220356 @default.
- W1973946121 hasAuthorship W1973946121A5036612469 @default.
- W1973946121 hasAuthorship W1973946121A5037171049 @default.
- W1973946121 hasAuthorship W1973946121A5060707163 @default.
- W1973946121 hasAuthorship W1973946121A5071796635 @default.
- W1973946121 hasAuthorship W1973946121A5074033253 @default.
- W1973946121 hasAuthorship W1973946121A5085245412 @default.
- W1973946121 hasConcept C110738630 @default.
- W1973946121 hasConcept C127413603 @default.
- W1973946121 hasConcept C151730666 @default.
- W1973946121 hasConcept C155011858 @default.
- W1973946121 hasConcept C171250308 @default.
- W1973946121 hasConcept C178790620 @default.
- W1973946121 hasConcept C185592680 @default.
- W1973946121 hasConcept C19067145 @default.
- W1973946121 hasConcept C192562407 @default.
- W1973946121 hasConcept C2779227376 @default.
- W1973946121 hasConcept C2779303976 @default.
- W1973946121 hasConcept C2816523 @default.
- W1973946121 hasConcept C3792809 @default.
- W1973946121 hasConcept C37982897 @default.
- W1973946121 hasConcept C42360764 @default.
- W1973946121 hasConcept C44280652 @default.
- W1973946121 hasConcept C49040817 @default.
- W1973946121 hasConcept C544956773 @default.
- W1973946121 hasConcept C64297162 @default.
- W1973946121 hasConcept C86803240 @default.
- W1973946121 hasConceptScore W1973946121C110738630 @default.
- W1973946121 hasConceptScore W1973946121C127413603 @default.
- W1973946121 hasConceptScore W1973946121C151730666 @default.
- W1973946121 hasConceptScore W1973946121C155011858 @default.
- W1973946121 hasConceptScore W1973946121C171250308 @default.
- W1973946121 hasConceptScore W1973946121C178790620 @default.
- W1973946121 hasConceptScore W1973946121C185592680 @default.
- W1973946121 hasConceptScore W1973946121C19067145 @default.
- W1973946121 hasConceptScore W1973946121C192562407 @default.
- W1973946121 hasConceptScore W1973946121C2779227376 @default.
- W1973946121 hasConceptScore W1973946121C2779303976 @default.
- W1973946121 hasConceptScore W1973946121C2816523 @default.
- W1973946121 hasConceptScore W1973946121C3792809 @default.
- W1973946121 hasConceptScore W1973946121C37982897 @default.
- W1973946121 hasConceptScore W1973946121C42360764 @default.
- W1973946121 hasConceptScore W1973946121C44280652 @default.
- W1973946121 hasConceptScore W1973946121C49040817 @default.
- W1973946121 hasConceptScore W1973946121C544956773 @default.
- W1973946121 hasConceptScore W1973946121C64297162 @default.
- W1973946121 hasConceptScore W1973946121C86803240 @default.
- W1973946121 hasIssue "1" @default.
- W1973946121 hasLocation W19739461211 @default.
- W1973946121 hasLocation W19739461212 @default.
- W1973946121 hasLocation W19739461213 @default.
- W1973946121 hasLocation W19739461214 @default.
- W1973946121 hasLocation W19739461215 @default.
- W1973946121 hasOpenAccess W1973946121 @default.
- W1973946121 hasPrimaryLocation W19739461211 @default.
- W1973946121 hasRelatedWork W1996866122 @default.
- W1973946121 hasRelatedWork W2005078522 @default.
- W1973946121 hasRelatedWork W2012783318 @default.
- W1973946121 hasRelatedWork W2035865932 @default.
- W1973946121 hasRelatedWork W2053588001 @default.
- W1973946121 hasRelatedWork W2057185306 @default.
- W1973946121 hasRelatedWork W2076527142 @default.
- W1973946121 hasRelatedWork W2392441461 @default.