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• W1973965366 endingPage "1629" @default.
• W1973965366 startingPage "1626" @default.
• W1973965366 abstract "The authors describe an improved production route for silicon nanofocusing lenses for hard x rays using e-beam lithography and deep reactive ion etching. As compared to previous prototypes, these optics have a significantly improved from fidelity, reducing spherical aberrations. Close to an ideal performance for the focusing of hard x rays is achieved with these optics, reaching a lateral beam size of about 50nm. The lens profile is checked by scanning electron microscopy." @default.
• W1973965366 created "2016-06-24" @default.
• W1973965366 creator A5002104590 @default.
• W1973965366 creator A5013165487 @default.
• W1973965366 creator A5028797718 @default.
• W1973965366 creator A5043957779 @default.
• W1973965366 creator A5060204434 @default.
• W1973965366 creator A5063422779 @default.
• W1973965366 date "2007-09-01" @default.
• W1973965366 modified "2023-09-28" @default.
• W1973965366 title "Optimized fabrication of silicon nanofocusing x-ray lenses using deep reactive ion etching" @default.
• W1973965366 cites W1975162163 @default.
• W1973965366 cites W1979799543 @default.
• W1973965366 cites W1995215283 @default.
• W1973965366 cites W1997892290 @default.
• W1973965366 cites W2001273194 @default.
• W1973965366 cites W2006681190 @default.
• W1973965366 cites W2012664802 @default.
• W1973965366 cites W2032237865 @default.
• W1973965366 cites W2037843910 @default.
• W1973965366 cites W2044116611 @default.
• W1973965366 cites W2057637042 @default.
• W1973965366 cites W2075717230 @default.
• W1973965366 cites W2085742149 @default.
• W1973965366 cites W2097077894 @default.
• W1973965366 cites W2109233209 @default.
• W1973965366 cites W2125446129 @default.
• W1973965366 cites W2280854744 @default.
• W1973965366 cites W2334644352 @default.
• W1973965366 doi "https://doi.org/10.1116/1.2769361" @default.
• W1973965366 hasPublicationYear "2007" @default.
• W1973965366 type Work @default.
• W1973965366 sameAs 1973965366 @default.
• W1973965366 citedByCount "23" @default.
• W1973965366 countsByYear W19739653662014 @default.
• W1973965366 countsByYear W19739653662015 @default.
• W1973965366 countsByYear W19739653662016 @default.
• W1973965366 countsByYear W19739653662017 @default.
• W1973965366 countsByYear W19739653662019 @default.
• W1973965366 crossrefType "journal-article" @default.
• W1973965366 hasAuthorship W1973965366A5002104590 @default.
• W1973965366 hasAuthorship W1973965366A5013165487 @default.
• W1973965366 hasAuthorship W1973965366A5028797718 @default.
• W1973965366 hasAuthorship W1973965366A5043957779 @default.
• W1973965366 hasAuthorship W1973965366A5060204434 @default.
• W1973965366 hasAuthorship W1973965366A5063422779 @default.
• W1973965366 hasConcept C100460472 @default.
• W1973965366 hasConcept C120665830 @default.
• W1973965366 hasConcept C121332964 @default.
• W1973965366 hasConcept C130472188 @default.
• W1973965366 hasConcept C136525101 @default.
• W1973965366 hasConcept C142724271 @default.
• W1973965366 hasConcept C145148216 @default.
• W1973965366 hasConcept C15336307 @default.
• W1973965366 hasConcept C161866238 @default.
• W1973965366 hasConcept C171250308 @default.
• W1973965366 hasConcept C192562407 @default.
• W1973965366 hasConcept C200274948 @default.
• W1973965366 hasConcept C204223013 @default.
• W1973965366 hasConcept C204787440 @default.
• W1973965366 hasConcept C26771246 @default.
• W1973965366 hasConcept C2779227376 @default.
• W1973965366 hasConcept C2779328170 @default.
• W1973965366 hasConcept C35655370 @default.
• W1973965366 hasConcept C42067758 @default.
• W1973965366 hasConcept C49040817 @default.
• W1973965366 hasConcept C53524968 @default.
• W1973965366 hasConcept C544956773 @default.
• W1973965366 hasConcept C62520636 @default.
• W1973965366 hasConcept C71924100 @default.
• W1973965366 hasConcept C83934398 @default.
• W1973965366 hasConceptScore W1973965366C100460472 @default.
• W1973965366 hasConceptScore W1973965366C120665830 @default.
• W1973965366 hasConceptScore W1973965366C121332964 @default.
• W1973965366 hasConceptScore W1973965366C130472188 @default.
• W1973965366 hasConceptScore W1973965366C136525101 @default.
• W1973965366 hasConceptScore W1973965366C142724271 @default.
• W1973965366 hasConceptScore W1973965366C145148216 @default.
• W1973965366 hasConceptScore W1973965366C15336307 @default.
• W1973965366 hasConceptScore W1973965366C161866238 @default.
• W1973965366 hasConceptScore W1973965366C171250308 @default.
• W1973965366 hasConceptScore W1973965366C192562407 @default.
• W1973965366 hasConceptScore W1973965366C200274948 @default.
• W1973965366 hasConceptScore W1973965366C204223013 @default.
• W1973965366 hasConceptScore W1973965366C204787440 @default.
• W1973965366 hasConceptScore W1973965366C26771246 @default.
• W1973965366 hasConceptScore W1973965366C2779227376 @default.
• W1973965366 hasConceptScore W1973965366C2779328170 @default.
• W1973965366 hasConceptScore W1973965366C35655370 @default.
• W1973965366 hasConceptScore W1973965366C42067758 @default.
• W1973965366 hasConceptScore W1973965366C49040817 @default.
• W1973965366 hasConceptScore W1973965366C53524968 @default.
• W1973965366 hasConceptScore W1973965366C544956773 @default.
• W1973965366 hasConceptScore W1973965366C62520636 @default.
• W1973965366 hasConceptScore W1973965366C71924100 @default.
• W1973965366 hasConceptScore W1973965366C83934398 @default.
• W1973965366 hasIssue "5" @default.
• W1973965366 hasLocation W19739653661 @default.

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