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- W1974013604 abstract "Importance of extreme ultraviolet (EUV) and far ultraviolet (FUV) calibration is growing fast as vacuum ultravioletpayloads are wildly used in national space plan. A calibration device is established especially for the requirement of EUVand FUV metrology and measurement. Spectral radiation and detector relative spectral response at EUV and FUVwavelengths can be calibrated with accuracy of 26% and 20%, respectively. The setup of the device, theoretical modeland value retroactive method are introduced and measurement of detector relative spectral response from 30 nm to 200nm is presented in this paper. The calibration device plays an important role in national space research." @default.
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- W1974013604 date "2014-11-18" @default.
- W1974013604 modified "2023-09-22" @default.
- W1974013604 title "Research on vacuum utraviolet calibration technology" @default.
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- W1974013604 doi "https://doi.org/10.1117/12.2075287" @default.
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