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- W1974085257 abstract "Excimer laser ablation of metals starts as a thermal process in the ∼1-J/cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> fluence range and makes a rapid transition near 5 J/cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> to a highly ionized plume (for 10-ns pulses). The 1-5-J/cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> range is of particular interest because it overlaps the irradiance range used to fabricate high- temperature superconductors, diamondlike carbon films, and conducting Cu films. Covered here are analyses aimed at a quantitative evaluation of the transition using a previously described model. The model is based primarily on the thermal (diffusivity and vapor pressure) properties of copper, along with electron heating by inverse bremsstrahlung due to electrons scattering off both neutrals and ions. The analyses provide a good fit and insight into previously obtained laser-induced fluorescence results for Cu <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0</sup> , Cu <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>+</sup> , and Cu <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> . Also, the surface shadowing and plasma heating beginning in the 5-J/cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> (500-MW/cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> ) region are clearly illustrated." @default.
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- W1974085257 date "1994-01-01" @default.
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- W1974085257 title "Modeling the thermal-to-plasma transitions for Cu photoablation" @default.
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- W1974085257 doi "https://doi.org/10.1147/rd.381.0003" @default.
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