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- W1974103691 endingPage "391" @default.
- W1974103691 startingPage "388" @default.
- W1974103691 abstract "Abstract There are quite a few methods for measuring moisture in gases, roughly into two categories: a direct measurement using an alternation amoumt of gaseous property. We have established a technology for trace moisture measurement in gases by optimizing a dew point method, one of the direct categories of measurement. Dew points are defined as the surface temperature at which dew or frost starts to form on a mirror during cooling of the mirror. To obtain moisture concentrations from measured dew points, calculations should be carried out based on a saturation vapor pressure curve for moisture. However equilibrium must be reached. That is, temperatures should be measured when moisture coexists in gas and liquid or solid phase and their partial pressure is equal to each other. Using this principle, measuring the phase changes of moisture in the equilibrium state enables us to measure trace moisture in gases more accurately." @default.
- W1974103691 created "2016-06-24" @default.
- W1974103691 creator A5003803554 @default.
- W1974103691 creator A5016087156 @default.
- W1974103691 creator A5022198863 @default.
- W1974103691 creator A5056002208 @default.
- W1974103691 date "1996-10-01" @default.
- W1974103691 modified "2023-10-02" @default.
- W1974103691 title "Trace moisture measurement in semiconductor gases" @default.
- W1974103691 cites W2050392384 @default.
- W1974103691 doi "https://doi.org/10.1016/s0925-4005(97)80102-5" @default.
- W1974103691 hasPublicationYear "1996" @default.
- W1974103691 type Work @default.
- W1974103691 sameAs 1974103691 @default.
- W1974103691 citedByCount "5" @default.
- W1974103691 countsByYear W19741036912021 @default.
- W1974103691 countsByYear W19741036912023 @default.
- W1974103691 crossrefType "journal-article" @default.
- W1974103691 hasAuthorship W1974103691A5003803554 @default.
- W1974103691 hasAuthorship W1974103691A5016087156 @default.
- W1974103691 hasAuthorship W1974103691A5022198863 @default.
- W1974103691 hasAuthorship W1974103691A5056002208 @default.
- W1974103691 hasConcept C107872376 @default.
- W1974103691 hasConcept C108225325 @default.
- W1974103691 hasConcept C127313418 @default.
- W1974103691 hasConcept C130047971 @default.
- W1974103691 hasConcept C138885662 @default.
- W1974103691 hasConcept C159985019 @default.
- W1974103691 hasConcept C176864760 @default.
- W1974103691 hasConcept C185592680 @default.
- W1974103691 hasConcept C192562407 @default.
- W1974103691 hasConcept C39432304 @default.
- W1974103691 hasConcept C41895202 @default.
- W1974103691 hasConcept C49040817 @default.
- W1974103691 hasConcept C75291252 @default.
- W1974103691 hasConcept C91586092 @default.
- W1974103691 hasConceptScore W1974103691C107872376 @default.
- W1974103691 hasConceptScore W1974103691C108225325 @default.
- W1974103691 hasConceptScore W1974103691C127313418 @default.
- W1974103691 hasConceptScore W1974103691C130047971 @default.
- W1974103691 hasConceptScore W1974103691C138885662 @default.
- W1974103691 hasConceptScore W1974103691C159985019 @default.
- W1974103691 hasConceptScore W1974103691C176864760 @default.
- W1974103691 hasConceptScore W1974103691C185592680 @default.
- W1974103691 hasConceptScore W1974103691C192562407 @default.
- W1974103691 hasConceptScore W1974103691C39432304 @default.
- W1974103691 hasConceptScore W1974103691C41895202 @default.
- W1974103691 hasConceptScore W1974103691C49040817 @default.
- W1974103691 hasConceptScore W1974103691C75291252 @default.
- W1974103691 hasConceptScore W1974103691C91586092 @default.
- W1974103691 hasIssue "1-3" @default.
- W1974103691 hasLocation W19741036911 @default.
- W1974103691 hasOpenAccess W1974103691 @default.
- W1974103691 hasPrimaryLocation W19741036911 @default.
- W1974103691 hasRelatedWork W1479939834 @default.
- W1974103691 hasRelatedWork W1559682196 @default.
- W1974103691 hasRelatedWork W1981498918 @default.
- W1974103691 hasRelatedWork W2044344181 @default.
- W1974103691 hasRelatedWork W2089155842 @default.
- W1974103691 hasRelatedWork W2350186125 @default.
- W1974103691 hasRelatedWork W2535321569 @default.
- W1974103691 hasRelatedWork W2587560107 @default.
- W1974103691 hasRelatedWork W3210587064 @default.
- W1974103691 hasRelatedWork W4221061874 @default.
- W1974103691 hasVolume "36" @default.
- W1974103691 isParatext "false" @default.
- W1974103691 isRetracted "false" @default.
- W1974103691 magId "1974103691" @default.
- W1974103691 workType "article" @default.