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- W1974158490 endingPage "L218" @default.
- W1974158490 startingPage "L218" @default.
- W1974158490 abstract "Thermally stable multilayer films of polyimide containing photosensitive disilane unit were applied to KrF excimer laser resists. The multilayer films prepared by the Langmuir-Blodgett technique were found to act as positive working resists with a resolution of 0.25 µm lines and spaces." @default.
- W1974158490 created "2016-06-24" @default.
- W1974158490 creator A5011283723 @default.
- W1974158490 creator A5032325750 @default.
- W1974158490 creator A5033992445 @default.
- W1974158490 creator A5068794352 @default.
- W1974158490 creator A5081779504 @default.
- W1974158490 creator A5090474622 @default.
- W1974158490 date "1991-02-01" @default.
- W1974158490 modified "2023-10-17" @default.
- W1974158490 title "Fine Patterns of Positive-Working Resists Using a Polyimide Langmuir-Blodgett Film System" @default.
- W1974158490 cites W1971627428 @default.
- W1974158490 cites W1972531034 @default.
- W1974158490 cites W1975042966 @default.
- W1974158490 cites W1988564043 @default.
- W1974158490 cites W1989174210 @default.
- W1974158490 cites W1991289402 @default.
- W1974158490 cites W2004893799 @default.
- W1974158490 cites W2006434675 @default.
- W1974158490 cites W2009229986 @default.
- W1974158490 cites W2052959943 @default.
- W1974158490 cites W2055872995 @default.
- W1974158490 cites W2057161587 @default.
- W1974158490 cites W2071026072 @default.
- W1974158490 cites W2085495277 @default.
- W1974158490 cites W2094691358 @default.
- W1974158490 doi "https://doi.org/10.1143/jjap.30.l218" @default.
- W1974158490 hasPublicationYear "1991" @default.
- W1974158490 type Work @default.
- W1974158490 sameAs 1974158490 @default.
- W1974158490 citedByCount "2" @default.
- W1974158490 crossrefType "journal-article" @default.
- W1974158490 hasAuthorship W1974158490A5011283723 @default.
- W1974158490 hasAuthorship W1974158490A5032325750 @default.
- W1974158490 hasAuthorship W1974158490A5033992445 @default.
- W1974158490 hasAuthorship W1974158490A5068794352 @default.
- W1974158490 hasAuthorship W1974158490A5081779504 @default.
- W1974158490 hasAuthorship W1974158490A5090474622 @default.
- W1974158490 hasConcept C120665830 @default.
- W1974158490 hasConcept C121332964 @default.
- W1974158490 hasConcept C127413603 @default.
- W1974158490 hasConcept C171250308 @default.
- W1974158490 hasConcept C180235531 @default.
- W1974158490 hasConcept C186807665 @default.
- W1974158490 hasConcept C192562407 @default.
- W1974158490 hasConcept C2776259327 @default.
- W1974158490 hasConcept C2779227376 @default.
- W1974158490 hasConcept C2780477314 @default.
- W1974158490 hasConcept C2780965675 @default.
- W1974158490 hasConcept C42360764 @default.
- W1974158490 hasConcept C49040817 @default.
- W1974158490 hasConcept C520434653 @default.
- W1974158490 hasConcept C53524968 @default.
- W1974158490 hasConcept C544956773 @default.
- W1974158490 hasConcept C7070889 @default.
- W1974158490 hasConceptScore W1974158490C120665830 @default.
- W1974158490 hasConceptScore W1974158490C121332964 @default.
- W1974158490 hasConceptScore W1974158490C127413603 @default.
- W1974158490 hasConceptScore W1974158490C171250308 @default.
- W1974158490 hasConceptScore W1974158490C180235531 @default.
- W1974158490 hasConceptScore W1974158490C186807665 @default.
- W1974158490 hasConceptScore W1974158490C192562407 @default.
- W1974158490 hasConceptScore W1974158490C2776259327 @default.
- W1974158490 hasConceptScore W1974158490C2779227376 @default.
- W1974158490 hasConceptScore W1974158490C2780477314 @default.
- W1974158490 hasConceptScore W1974158490C2780965675 @default.
- W1974158490 hasConceptScore W1974158490C42360764 @default.
- W1974158490 hasConceptScore W1974158490C49040817 @default.
- W1974158490 hasConceptScore W1974158490C520434653 @default.
- W1974158490 hasConceptScore W1974158490C53524968 @default.
- W1974158490 hasConceptScore W1974158490C544956773 @default.
- W1974158490 hasConceptScore W1974158490C7070889 @default.
- W1974158490 hasIssue "2A" @default.
- W1974158490 hasLocation W19741584901 @default.
- W1974158490 hasOpenAccess W1974158490 @default.
- W1974158490 hasPrimaryLocation W19741584901 @default.
- W1974158490 hasRelatedWork W1819687869 @default.
- W1974158490 hasRelatedWork W1974158490 @default.
- W1974158490 hasRelatedWork W1994777210 @default.
- W1974158490 hasRelatedWork W1999917789 @default.
- W1974158490 hasRelatedWork W2031013703 @default.
- W1974158490 hasRelatedWork W2057161587 @default.
- W1974158490 hasRelatedWork W2060285360 @default.
- W1974158490 hasRelatedWork W2326786239 @default.
- W1974158490 hasRelatedWork W2896355582 @default.
- W1974158490 hasRelatedWork W2903898302 @default.
- W1974158490 hasVolume "30" @default.
- W1974158490 isParatext "false" @default.
- W1974158490 isRetracted "false" @default.
- W1974158490 magId "1974158490" @default.
- W1974158490 workType "article" @default.