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- W1974328169 abstract "We characterize a laser produced gas puff plasma for soft x- ray generation. Strong emissions at 11.4 nm wavelength region was observed, using krypton and xenon gas puff targets irradiated by a 0.7J/8ns Nd:YAG laser. Space resolved x-ray spectra measurement indicated that the source size depends on the Rayleigh length and the gas density profile. A channeling effect for larger tare size which is connected with the thermal focusing has been observed." @default.
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- W1974328169 date "2000-01-11" @default.
- W1974328169 modified "2023-09-23" @default.
- W1974328169 title "Characterization of laser-produced gas-puff plasmas for soft x-ray projection lithography" @default.
- W1974328169 doi "https://doi.org/10.1117/12.375161" @default.
- W1974328169 hasPublicationYear "2000" @default.
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