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Matches in SemOpenAlex for { <https://semopenalex.org/work/W1974375700> ?p ?o ?g. }

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• W1974375700 abstract "A simulation of the profile of holographically recorded structures in photoresists is performed. In addition to its simplicity this simulation can be used to take into account the effects that arise from exposure, photosensitization, development, and resolution of positive photoresists. We analyzed the effects of isotropy of wet development, nonlinearity of the photoresist response curve, background light, and standing waves produced by reflection at the film–substrate interface by using this simulation, and the results agree with the experimentally recorded profiles." @default.
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• W1974375700 date "1995-02-01" @default.
• W1974375700 modified "2023-10-13" @default.
• W1974375700 title "Developed profile of holographically exposed photoresist gratings" @default.
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• W1974375700 doi "https://doi.org/10.1364/ao.34.000597" @default.
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