Matches in SemOpenAlex for { <https://semopenalex.org/work/W1974414386> ?p ?o ?g. }
- W1974414386 endingPage "485304" @default.
- W1974414386 startingPage "485304" @default.
- W1974414386 abstract "Magnesium oxide (MgO) films have been grown by atomic layer deposition in the wide deposition temperature window of 80–350 °C by using bis(cyclopentadienyl)magnesium and H2O precursors. MgO thin films are deposited on both HF-last Si(1 0 0) and SiO2/Si substrates at a constant growth rate of ∼0.12 nm cycle−1. The structural, morphological and chemical properties of the synthesized MgO thin films are investigated by x-ray reflectivity, grazing incidence x-ray diffraction, time-of-flight secondary ion mass spectrometry and atomic force microscopy measurements. MgO layers are characterized by sharp interface with the substrate and limited surface roughness, besides good chemical uniformity and polycrystalline structure for thickness above 7 nm. C–V measurements performed on Al/MgO/Si MOS capacitors, with MgO in the 4.6–11 nm thickness range, allow determining a dielectric constant (κ) ∼ 11. Co layers are grown by chemical vapour deposition in direct contact with MgO without vacuum-break (base pressure 10−5–10−6 Pa). The as-grown Co/MgO stacks show sharp interfaces and no elements interdiffusion among layers. C–V and I–V measurements have been conducted on Co/MgO/Si MOS capacitors. The dielectric properties of MgO are not influenced by the further process of Co deposition." @default.
- W1974414386 created "2016-06-24" @default.
- W1974414386 creator A5008647090 @default.
- W1974414386 creator A5016618651 @default.
- W1974414386 creator A5037565256 @default.
- W1974414386 creator A5043470807 @default.
- W1974414386 creator A5061394135 @default.
- W1974414386 creator A5063391155 @default.
- W1974414386 creator A5067542016 @default.
- W1974414386 date "2013-11-07" @default.
- W1974414386 modified "2023-10-15" @default.
- W1974414386 title "Low-temperature atomic layer deposition of MgO thin films on Si" @default.
- W1974414386 cites W1502972550 @default.
- W1974414386 cites W1633007946 @default.
- W1974414386 cites W172138776 @default.
- W1974414386 cites W1963535111 @default.
- W1974414386 cites W1966151474 @default.
- W1974414386 cites W1971068502 @default.
- W1974414386 cites W1975105794 @default.
- W1974414386 cites W1986165255 @default.
- W1974414386 cites W1991813033 @default.
- W1974414386 cites W1993748450 @default.
- W1974414386 cites W1997903922 @default.
- W1974414386 cites W1999829102 @default.
- W1974414386 cites W2001987819 @default.
- W1974414386 cites W2003453152 @default.
- W1974414386 cites W2010339750 @default.
- W1974414386 cites W2012798920 @default.
- W1974414386 cites W2016162937 @default.
- W1974414386 cites W2016575731 @default.
- W1974414386 cites W2017149239 @default.
- W1974414386 cites W2025783171 @default.
- W1974414386 cites W2034367594 @default.
- W1974414386 cites W2036198483 @default.
- W1974414386 cites W2039780806 @default.
- W1974414386 cites W2049945085 @default.
- W1974414386 cites W2054475943 @default.
- W1974414386 cites W2055878167 @default.
- W1974414386 cites W2078688127 @default.
- W1974414386 cites W2080628675 @default.
- W1974414386 cites W2088797290 @default.
- W1974414386 cites W2090990456 @default.
- W1974414386 cites W2144508730 @default.
- W1974414386 cites W2333660248 @default.
- W1974414386 doi "https://doi.org/10.1088/0022-3727/46/48/485304" @default.
- W1974414386 hasPublicationYear "2013" @default.
- W1974414386 type Work @default.
- W1974414386 sameAs 1974414386 @default.
- W1974414386 citedByCount "31" @default.
- W1974414386 countsByYear W19744143862014 @default.
- W1974414386 countsByYear W19744143862015 @default.
- W1974414386 countsByYear W19744143862016 @default.
- W1974414386 countsByYear W19744143862017 @default.
- W1974414386 countsByYear W19744143862018 @default.
- W1974414386 countsByYear W19744143862019 @default.
- W1974414386 countsByYear W19744143862020 @default.
- W1974414386 countsByYear W19744143862021 @default.
- W1974414386 countsByYear W19744143862022 @default.
- W1974414386 countsByYear W19744143862023 @default.
- W1974414386 crossrefType "journal-article" @default.
- W1974414386 hasAuthorship W1974414386A5008647090 @default.
- W1974414386 hasAuthorship W1974414386A5016618651 @default.
- W1974414386 hasAuthorship W1974414386A5037565256 @default.
- W1974414386 hasAuthorship W1974414386A5043470807 @default.
- W1974414386 hasAuthorship W1974414386A5061394135 @default.
- W1974414386 hasAuthorship W1974414386A5063391155 @default.
- W1974414386 hasAuthorship W1974414386A5067542016 @default.
- W1974414386 hasConcept C127313418 @default.
- W1974414386 hasConcept C127413603 @default.
- W1974414386 hasConcept C151730666 @default.
- W1974414386 hasConcept C171250308 @default.
- W1974414386 hasConcept C185592680 @default.
- W1974414386 hasConcept C19067145 @default.
- W1974414386 hasConcept C192562407 @default.
- W1974414386 hasConcept C2779227376 @default.
- W1974414386 hasConcept C2816523 @default.
- W1974414386 hasConcept C42360764 @default.
- W1974414386 hasConcept C48123060 @default.
- W1974414386 hasConcept C62960913 @default.
- W1974414386 hasConcept C64297162 @default.
- W1974414386 hasConcept C69544855 @default.
- W1974414386 hasConceptScore W1974414386C127313418 @default.
- W1974414386 hasConceptScore W1974414386C127413603 @default.
- W1974414386 hasConceptScore W1974414386C151730666 @default.
- W1974414386 hasConceptScore W1974414386C171250308 @default.
- W1974414386 hasConceptScore W1974414386C185592680 @default.
- W1974414386 hasConceptScore W1974414386C19067145 @default.
- W1974414386 hasConceptScore W1974414386C192562407 @default.
- W1974414386 hasConceptScore W1974414386C2779227376 @default.
- W1974414386 hasConceptScore W1974414386C2816523 @default.
- W1974414386 hasConceptScore W1974414386C42360764 @default.
- W1974414386 hasConceptScore W1974414386C48123060 @default.
- W1974414386 hasConceptScore W1974414386C62960913 @default.
- W1974414386 hasConceptScore W1974414386C64297162 @default.
- W1974414386 hasConceptScore W1974414386C69544855 @default.
- W1974414386 hasIssue "48" @default.
- W1974414386 hasLocation W19744143861 @default.
- W1974414386 hasOpenAccess W1974414386 @default.