FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1974433423> ?p ?o ?g. }

• W1974433423 endingPage "6750" @default.
• W1974433423 startingPage "6750" @default.
• W1974433423 abstract "We have designed and started the fabrication of 3-mirror ring-field projection optics for extreme ultraviolet lithography (EUVL) and an experimental exposure system using the projection optics, which enable a large-field (30 mm×20 mm), high-resolution (<100 nm) exposure. EUV exposure experiments will be performed using the EUVL beam line to be constructed at the new synchrotron ring called New Subaru, which is now under construction in Hyogo Prefecture. In this paper the details of the EUV exposure system will be described." @default.
• W1974433423 created "2016-06-24" @default.
• W1974433423 creator A5018497095 @default.
• W1974433423 creator A5027025411 @default.
• W1974433423 creator A5048612170 @default.
• W1974433423 creator A5052642226 @default.
• W1974433423 creator A5062033510 @default.
• W1974433423 creator A5062262143 @default.
• W1974433423 creator A5090489509 @default.
• W1974433423 creator A5091184869 @default.
• W1974433423 date "1998-12-01" @default.
• W1974433423 modified "2023-09-26" @default.
• W1974433423 title "Ring-Field Extreme Ultraviolet Exposure System Using Aspherical Mirrors" @default.
• W1974433423 cites W1491186643 @default.
• W1974433423 cites W1677507622 @default.
• W1974433423 cites W1977538383 @default.
• W1974433423 cites W1984029249 @default.
• W1974433423 cites W1987793777 @default.
• W1974433423 cites W1988934713 @default.
• W1974433423 cites W1993797815 @default.
• W1974433423 cites W1999734163 @default.
• W1974433423 cites W2001172037 @default.
• W1974433423 cites W2006873122 @default.
• W1974433423 cites W2007268106 @default.
• W1974433423 cites W2008573805 @default.
• W1974433423 cites W2019957076 @default.
• W1974433423 cites W2022241209 @default.
• W1974433423 cites W2029847018 @default.
• W1974433423 cites W2034846275 @default.
• W1974433423 cites W2037299286 @default.
• W1974433423 cites W2051710924 @default.
• W1974433423 cites W2055502283 @default.
• W1974433423 cites W2059747973 @default.
• W1974433423 cites W2067537880 @default.
• W1974433423 cites W2071646973 @default.
• W1974433423 cites W2072576365 @default.
• W1974433423 cites W2086304907 @default.
• W1974433423 cites W2088703938 @default.
• W1974433423 cites W2095416834 @default.
• W1974433423 cites W2102586241 @default.
• W1974433423 cites W2113403209 @default.
• W1974433423 cites W2131681192 @default.
• W1974433423 doi "https://doi.org/10.1143/jjap.37.6750" @default.
• W1974433423 hasPublicationYear "1998" @default.
• W1974433423 type Work @default.
• W1974433423 sameAs 1974433423 @default.
• W1974433423 citedByCount "8" @default.
• W1974433423 crossrefType "journal-article" @default.
• W1974433423 hasAuthorship W1974433423A5018497095 @default.
• W1974433423 hasAuthorship W1974433423A5027025411 @default.
• W1974433423 hasAuthorship W1974433423A5048612170 @default.
• W1974433423 hasAuthorship W1974433423A5052642226 @default.
• W1974433423 hasAuthorship W1974433423A5062033510 @default.
• W1974433423 hasAuthorship W1974433423A5062262143 @default.
• W1974433423 hasAuthorship W1974433423A5090489509 @default.
• W1974433423 hasAuthorship W1974433423A5091184869 @default.
• W1974433423 hasConcept C120665830 @default.
• W1974433423 hasConcept C121332964 @default.
• W1974433423 hasConcept C136525101 @default.
• W1974433423 hasConcept C136959337 @default.
• W1974433423 hasConcept C142724271 @default.
• W1974433423 hasConcept C146024833 @default.
• W1974433423 hasConcept C162996421 @default.
• W1974433423 hasConcept C16332341 @default.
• W1974433423 hasConcept C168834538 @default.
• W1974433423 hasConcept C178790620 @default.
• W1974433423 hasConcept C185592680 @default.
• W1974433423 hasConcept C192562407 @default.
• W1974433423 hasConcept C204223013 @default.
• W1974433423 hasConcept C204787440 @default.
• W1974433423 hasConcept C21368211 @default.
• W1974433423 hasConcept C2776798109 @default.
• W1974433423 hasConcept C2780378348 @default.
• W1974433423 hasConcept C49040817 @default.
• W1974433423 hasConcept C520434653 @default.
• W1974433423 hasConcept C71924100 @default.
• W1974433423 hasConceptScore W1974433423C120665830 @default.
• W1974433423 hasConceptScore W1974433423C121332964 @default.
• W1974433423 hasConceptScore W1974433423C136525101 @default.
• W1974433423 hasConceptScore W1974433423C136959337 @default.
• W1974433423 hasConceptScore W1974433423C142724271 @default.
• W1974433423 hasConceptScore W1974433423C146024833 @default.
• W1974433423 hasConceptScore W1974433423C162996421 @default.
• W1974433423 hasConceptScore W1974433423C16332341 @default.
• W1974433423 hasConceptScore W1974433423C168834538 @default.
• W1974433423 hasConceptScore W1974433423C178790620 @default.
• W1974433423 hasConceptScore W1974433423C185592680 @default.
• W1974433423 hasConceptScore W1974433423C192562407 @default.
• W1974433423 hasConceptScore W1974433423C204223013 @default.
• W1974433423 hasConceptScore W1974433423C204787440 @default.
• W1974433423 hasConceptScore W1974433423C21368211 @default.
• W1974433423 hasConceptScore W1974433423C2776798109 @default.
• W1974433423 hasConceptScore W1974433423C2780378348 @default.
• W1974433423 hasConceptScore W1974433423C49040817 @default.
• W1974433423 hasConceptScore W1974433423C520434653 @default.
• W1974433423 hasConceptScore W1974433423C71924100 @default.
• W1974433423 hasIssue "12S" @default.
• W1974433423 hasLocation W19744334231 @default.

• next