Matches in SemOpenAlex for { <https://semopenalex.org/work/W1974633493> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W1974633493 endingPage "065013" @default.
- W1974633493 startingPage "065013" @default.
- W1974633493 abstract "The development of a high-throughput single-cell metabolic rate monitoring system relies on the use of transparent substrate material for a single cell-trapping platform. The high optical transparency, high chemical resistance, improved surface quality and compatibility with the silicon micromachining process of fused silica make it very attractive and desirable for this application. In this paper, we report the results from the development and characterization of a hydrofluoric acid (HF) based deep wet-etch process on fused silica. The pin holes and notching defects of various single-coated masking layers during the etching are characterized and the most suitable masking materials are identified for different etch depths. The dependence of the average etch rate and surface roughness on the etch depth, impurity concentration and HF composition are also examined. The resulting undercut from the deep HF etch using various masking materials is also investigated. The developed and characterized process techniques have been successfully implemented in the fabrication of micro-well arrays for single cell trapping and sensor deposition. Up to 60 µm deep micro-wells have been etched in a fused silica substrate with over 90% process yield and repeatability. To our knowledge, such etch depth has never been achieved in a fused silica substrate by using a non-diluted HF etchant and a single-coated masking layer at room temperature." @default.
- W1974633493 created "2016-06-24" @default.
- W1974633493 creator A5022088189 @default.
- W1974633493 creator A5040606823 @default.
- W1974633493 creator A5064824509 @default.
- W1974633493 creator A5070564774 @default.
- W1974633493 creator A5071323218 @default.
- W1974633493 date "2009-05-20" @default.
- W1974633493 modified "2023-10-02" @default.
- W1974633493 title "Characterization of deep wet etching of fused silica glass for single cell and optical sensor deposition" @default.
- W1974633493 cites W1480951969 @default.
- W1974633493 cites W1964139393 @default.
- W1974633493 cites W1981948990 @default.
- W1974633493 cites W1990907766 @default.
- W1974633493 cites W2014754355 @default.
- W1974633493 cites W2030401044 @default.
- W1974633493 cites W2054977365 @default.
- W1974633493 cites W2061273695 @default.
- W1974633493 cites W2066262204 @default.
- W1974633493 cites W2077394999 @default.
- W1974633493 cites W2078325647 @default.
- W1974633493 cites W2084551096 @default.
- W1974633493 cites W2088885597 @default.
- W1974633493 cites W2106285733 @default.
- W1974633493 doi "https://doi.org/10.1088/0960-1317/19/6/065013" @default.
- W1974633493 hasPublicationYear "2009" @default.
- W1974633493 type Work @default.
- W1974633493 sameAs 1974633493 @default.
- W1974633493 citedByCount "67" @default.
- W1974633493 countsByYear W19746334932012 @default.
- W1974633493 countsByYear W19746334932013 @default.
- W1974633493 countsByYear W19746334932014 @default.
- W1974633493 countsByYear W19746334932015 @default.
- W1974633493 countsByYear W19746334932016 @default.
- W1974633493 countsByYear W19746334932017 @default.
- W1974633493 countsByYear W19746334932018 @default.
- W1974633493 countsByYear W19746334932019 @default.
- W1974633493 countsByYear W19746334932020 @default.
- W1974633493 countsByYear W19746334932021 @default.
- W1974633493 countsByYear W19746334932022 @default.
- W1974633493 countsByYear W19746334932023 @default.
- W1974633493 crossrefType "journal-article" @default.
- W1974633493 hasAuthorship W1974633493A5022088189 @default.
- W1974633493 hasAuthorship W1974633493A5040606823 @default.
- W1974633493 hasAuthorship W1974633493A5064824509 @default.
- W1974633493 hasAuthorship W1974633493A5070564774 @default.
- W1974633493 hasAuthorship W1974633493A5071323218 @default.
- W1974633493 hasConcept C100460472 @default.
- W1974633493 hasConcept C127313418 @default.
- W1974633493 hasConcept C151730666 @default.
- W1974633493 hasConcept C171250308 @default.
- W1974633493 hasConcept C192562407 @default.
- W1974633493 hasConcept C2779227376 @default.
- W1974633493 hasConcept C2780841128 @default.
- W1974633493 hasConcept C2816523 @default.
- W1974633493 hasConcept C49040817 @default.
- W1974633493 hasConcept C64297162 @default.
- W1974633493 hasConceptScore W1974633493C100460472 @default.
- W1974633493 hasConceptScore W1974633493C127313418 @default.
- W1974633493 hasConceptScore W1974633493C151730666 @default.
- W1974633493 hasConceptScore W1974633493C171250308 @default.
- W1974633493 hasConceptScore W1974633493C192562407 @default.
- W1974633493 hasConceptScore W1974633493C2779227376 @default.
- W1974633493 hasConceptScore W1974633493C2780841128 @default.
- W1974633493 hasConceptScore W1974633493C2816523 @default.
- W1974633493 hasConceptScore W1974633493C49040817 @default.
- W1974633493 hasConceptScore W1974633493C64297162 @default.
- W1974633493 hasIssue "6" @default.
- W1974633493 hasLocation W19746334931 @default.
- W1974633493 hasOpenAccess W1974633493 @default.
- W1974633493 hasPrimaryLocation W19746334931 @default.
- W1974633493 hasRelatedWork W2050045653 @default.
- W1974633493 hasRelatedWork W2158706874 @default.
- W1974633493 hasRelatedWork W2321841960 @default.
- W1974633493 hasRelatedWork W2352592110 @default.
- W1974633493 hasRelatedWork W2617599841 @default.
- W1974633493 hasRelatedWork W2737498735 @default.
- W1974633493 hasRelatedWork W3085622580 @default.
- W1974633493 hasRelatedWork W4243387708 @default.
- W1974633493 hasRelatedWork W4247476793 @default.
- W1974633493 hasRelatedWork W4249938786 @default.
- W1974633493 hasVolume "19" @default.
- W1974633493 isParatext "false" @default.
- W1974633493 isRetracted "false" @default.
- W1974633493 magId "1974633493" @default.
- W1974633493 workType "article" @default.