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- W1974633707 abstract "This paper describes a steady numerical flow model and experimental gas flow results of a self-encapsulated, piezoelectrically actuated, cryogenic micro-valve for distributed cooling applications. Experimental flow data of the prototype micro-valve design is obtained for various gases at room temperature and for helium at near liquid nitrogen temperature. With a pressure differential of 100 kPa across the inlet and outlet, a prototype micro-valve is shown to modulate the flow of room temperature helium from 1200 to 0 sccm. Numerical flow results and experimental data agree well, with 60% of the data points falling within the range of ±10%." @default.
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- W1974633707 date "2007-09-01" @default.
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- W1974633707 title "A numerical flow model and experimental results of a cryogenic micro-valve for distributed cooling applications" @default.
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- W1974633707 doi "https://doi.org/10.1016/j.cryogenics.2007.06.002" @default.
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