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- W1974636006 abstract "Microscope coherent optical processor (M-COP) has been configured and used to inspect the micro-patterns on a silicon wafer in real time. A technique for the measurement of the scale change of this pattern has been devised. Theoretical and experimental results showing the viability of this technique are presented.© (1992) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
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- W1974636006 date "1992-08-01" @default.
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- W1974636006 title "<title>Wafer pattern inspection using a Coherent Optical Processor</title>" @default.
- W1974636006 doi "https://doi.org/10.1117/12.130299" @default.
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