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- W1974684611 abstract "This paper describes the fabrication method of an all SU-8 microfluidic device with built-in 3D fine micromesh structures. 3D micromesh structures were seamlessly integrated into the SU-8 sealed microchannel. To eliminate gap formation and filling of the microchannel, the built-in micromeshes in the microchannel were formed by photolithography after bonding the SU-8 top-cover layer and the SU-8 bottom substrate. The lift-off method, using lift-off resist as a sacrificial layer, was utilized to release the all SU-8 microfluidic chips. Monolithic SU-8 structures realize uniform physical and chemical surface properties required in microfluidic devices for practical use. As an application, fragmentation of a water droplet in an organic carrier formed by a two-phase flow was demonstrated." @default.
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- W1974684611 date "2006-09-15" @default.
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- W1974684611 title "An all SU-8 microfluidic chip with built-in 3D fine microstructures" @default.
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- W1974684611 doi "https://doi.org/10.1088/0960-1317/16/11/010" @default.
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