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- W1974702428 abstract "A defocused Laue diffractometer setup operating with the white beam of a high energy X-ray tube has been used for a topographic visualization of structural defects in semiconductor wafers. The laboratory white beam X-ray topograph of a Czochralski Si wafer with oxygen precipitates grown in an annealing process is compared to a μPCD image. Further, the dislocation network in a VGF GaAs wafer is studied under thermal annealing up to 1140°C and the in-situ capability of the setup is demonstrated." @default.
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- W1974702428 date "2011-08-01" @default.
- W1974702428 modified "2023-09-27" @default.
- W1974702428 title "Structural Defect Studies of Semiconductor Crystals with Laue Topography" @default.
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- W1974702428 doi "https://doi.org/10.4028/www.scientific.net/ssp.178-179.360" @default.
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