Matches in SemOpenAlex for { <https://semopenalex.org/work/W1974709951> ?p ?o ?g. }
- W1974709951 endingPage "1460" @default.
- W1974709951 startingPage "1451" @default.
- W1974709951 abstract "A parametric evaluation of the principal factors which affect cathodic sputtering rates in glow discharge sources is performed. Employing a planar, disk cathode in the simple diode geometry, the roles of discharge voltage, current, and pressure are evaluated for the sputtering of oxygen-free hard copper (OFHC). Samples were sputtered at discharge currents of 5–70 mA over an argon pressure range of 1.5–8 torr (200–1064 Pa). In addition, the relationship between applied power and sputter weight loss is investigated. Studies indicate that the current density at the cathode surface and the discharge voltage are directly related and are keys in the determination of sputtering rates. Through factor analysis, an empirical formula is developed which is useful in quantifying sputter rates for a given set of discharge conditions." @default.
- W1974709951 created "2016-06-24" @default.
- W1974709951 creator A5008086815 @default.
- W1974709951 creator A5011021504 @default.
- W1974709951 date "1988-01-01" @default.
- W1974709951 modified "2023-09-26" @default.
- W1974709951 title "Parametric evaluation of sputtering in a planar, diode glow discharge—I. Sputtering of oxygen-free hard copper (OFHC)" @default.
- W1974709951 cites W1571387006 @default.
- W1974709951 cites W1968428741 @default.
- W1974709951 cites W1969357970 @default.
- W1974709951 cites W1996242369 @default.
- W1974709951 cites W2013713133 @default.
- W1974709951 cites W2015318095 @default.
- W1974709951 cites W2020442021 @default.
- W1974709951 cites W2040792824 @default.
- W1974709951 cites W2042116520 @default.
- W1974709951 cites W2052414057 @default.
- W1974709951 cites W2064900423 @default.
- W1974709951 cites W2086382035 @default.
- W1974709951 cites W2093336925 @default.
- W1974709951 cites W2581891486 @default.
- W1974709951 cites W270822205 @default.
- W1974709951 cites W65815440 @default.
- W1974709951 doi "https://doi.org/10.1016/0584-8547(88)80184-8" @default.
- W1974709951 hasPublicationYear "1988" @default.
- W1974709951 type Work @default.
- W1974709951 sameAs 1974709951 @default.
- W1974709951 citedByCount "30" @default.
- W1974709951 countsByYear W19747099512016 @default.
- W1974709951 crossrefType "journal-article" @default.
- W1974709951 hasAuthorship W1974709951A5008086815 @default.
- W1974709951 hasAuthorship W1974709951A5011021504 @default.
- W1974709951 hasConcept C113196181 @default.
- W1974709951 hasConcept C121332964 @default.
- W1974709951 hasConcept C125989502 @default.
- W1974709951 hasConcept C127413603 @default.
- W1974709951 hasConcept C131097465 @default.
- W1974709951 hasConcept C147789679 @default.
- W1974709951 hasConcept C171250308 @default.
- W1974709951 hasConcept C184779094 @default.
- W1974709951 hasConcept C185592680 @default.
- W1974709951 hasConcept C19067145 @default.
- W1974709951 hasConcept C191897082 @default.
- W1974709951 hasConcept C192562407 @default.
- W1974709951 hasConcept C22423302 @default.
- W1974709951 hasConcept C2776595061 @default.
- W1974709951 hasConcept C30646810 @default.
- W1974709951 hasConcept C43617362 @default.
- W1974709951 hasConcept C49040817 @default.
- W1974709951 hasConcept C49110097 @default.
- W1974709951 hasConcept C544778455 @default.
- W1974709951 hasConcept C547737533 @default.
- W1974709951 hasConcept C62520636 @default.
- W1974709951 hasConcept C78434282 @default.
- W1974709951 hasConcept C78519656 @default.
- W1974709951 hasConcept C82706917 @default.
- W1974709951 hasConcept C97355855 @default.
- W1974709951 hasConceptScore W1974709951C113196181 @default.
- W1974709951 hasConceptScore W1974709951C121332964 @default.
- W1974709951 hasConceptScore W1974709951C125989502 @default.
- W1974709951 hasConceptScore W1974709951C127413603 @default.
- W1974709951 hasConceptScore W1974709951C131097465 @default.
- W1974709951 hasConceptScore W1974709951C147789679 @default.
- W1974709951 hasConceptScore W1974709951C171250308 @default.
- W1974709951 hasConceptScore W1974709951C184779094 @default.
- W1974709951 hasConceptScore W1974709951C185592680 @default.
- W1974709951 hasConceptScore W1974709951C19067145 @default.
- W1974709951 hasConceptScore W1974709951C191897082 @default.
- W1974709951 hasConceptScore W1974709951C192562407 @default.
- W1974709951 hasConceptScore W1974709951C22423302 @default.
- W1974709951 hasConceptScore W1974709951C2776595061 @default.
- W1974709951 hasConceptScore W1974709951C30646810 @default.
- W1974709951 hasConceptScore W1974709951C43617362 @default.
- W1974709951 hasConceptScore W1974709951C49040817 @default.
- W1974709951 hasConceptScore W1974709951C49110097 @default.
- W1974709951 hasConceptScore W1974709951C544778455 @default.
- W1974709951 hasConceptScore W1974709951C547737533 @default.
- W1974709951 hasConceptScore W1974709951C62520636 @default.
- W1974709951 hasConceptScore W1974709951C78434282 @default.
- W1974709951 hasConceptScore W1974709951C78519656 @default.
- W1974709951 hasConceptScore W1974709951C82706917 @default.
- W1974709951 hasConceptScore W1974709951C97355855 @default.
- W1974709951 hasIssue "12" @default.
- W1974709951 hasLocation W19747099511 @default.
- W1974709951 hasOpenAccess W1974709951 @default.
- W1974709951 hasPrimaryLocation W19747099511 @default.
- W1974709951 hasRelatedWork W1969278911 @default.
- W1974709951 hasRelatedWork W1974709951 @default.
- W1974709951 hasRelatedWork W1990919541 @default.
- W1974709951 hasRelatedWork W2015239940 @default.
- W1974709951 hasRelatedWork W2021639497 @default.
- W1974709951 hasRelatedWork W2060798647 @default.
- W1974709951 hasRelatedWork W2070895913 @default.
- W1974709951 hasRelatedWork W2115546160 @default.
- W1974709951 hasRelatedWork W2329317039 @default.
- W1974709951 hasRelatedWork W2335425993 @default.
- W1974709951 hasVolume "43" @default.
- W1974709951 isParatext "false" @default.